2003
DOI: 10.1038/nmat941
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Fabrication of solid-state nanopores with single-nanometre precision

Abstract: Single nanometre-sized pores (nanopores) embedded in an insulating membrane are an exciting new class of nanosensors for rapid electrical detection and characterization of biomolecules. Notable examples include alpha-hemolysin protein nanopores in lipid membranes and solid-state nanopores in Si3N4. Here we report a new technique for fabricating silicon oxide nanopores with single-nanometre precision and direct visual feedback, using state-of-the-art silicon technology and transmission electron microscopy. Firs… Show more

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Cited by 1,245 publications
(1,238 citation statements)
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“…12 needs to be taken into account. Macroscopic and microscopic contact angles can be correlated to each other using a modification of Young's equation 71 (13) (14) where θ is the microscopic WCA, τ is the line tension, γ LV is the surface tension at the liquidvapor interface, and r B is the radius of the base of the droplet.…”
Section: Influence Of Droplet Size On Water Contact Anglementioning
confidence: 99%
See 1 more Smart Citation
“…12 needs to be taken into account. Macroscopic and microscopic contact angles can be correlated to each other using a modification of Young's equation 71 (13) (14) where θ is the microscopic WCA, τ is the line tension, γ LV is the surface tension at the liquidvapor interface, and r B is the radius of the base of the droplet.…”
Section: Influence Of Droplet Size On Water Contact Anglementioning
confidence: 99%
“…Recent advances in silica nanotechnology 13,14 have been exploited to manufacture pores in thin synthetic membranes with subnanometer precision. Immersed in an electrolytic solution and under the influence of an electric field, nanopores can be deployed to filter and monitor translocation of DNA and other charged macromolecules.…”
Section: Introductionmentioning
confidence: 99%
“…This strategy is especially useful for creating nanopores with diameters of 2 nm or less, the most appropriate dimension that exhibits many unusual properties 18 . Molecular-scale nanopores are technically challenging for currently known techniques such as electron-beam lithography (pore size ~5-10 nm) 19 or track-etching (pore size typically ≥10 nm) 20 that are used to fabricate polymer or solid-state films with low surface pore densities.…”
mentioning
confidence: 99%
“…[1][2][3][4] But despite the stability, tunability, and other potential advantages that fabricated solid state nanopores may offer, the ion beam, electron beam, or chemical etch fabrication conditions used to create nanopores usually yield uncharacterized and possibly unfavorable surface properties that can interfere with the pore's sensing abilities.…”
mentioning
confidence: 99%