Fabrication of submicron-scale SrTiO3−δ devices by an atomic force microscope

Pellegrino, L.; Pallecchi, I.; Marré, D.; Bellingeri, E.; Siri, A. S.

doi:10.1063/1.1521583

Cited by 77 publications

(56 citation statements)

References 27 publications

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“…Strontium titanate, SrTiO 3 , a typical ternary perovskite-type oxide with large nonlinear optical coefficients and dielectric constants, has attracted considerable attention because of its wide applications in the field of nonlinear optics, thin-film capacitors, oxygen gas sensors, optical memories, and electrooptic modulators [14][15][16][17][18][19]. Moreover, SrTiO 3 is also an important n-type semiconductor with a basic framework of Ti-O polyhedron as TiO 2 .…”

Section: Introductionmentioning

confidence: 99%

Facile synthesis of SrTiO3 hollow microspheres built as assembly of nanocubes and their associated photocatalytic activity

Zheng

Huang

Qin

et al. 2011

Journal of Colloid and Interface Science

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Section: Introductionmentioning

confidence: 99%

Facile synthesis of SrTiO3 hollow microspheres built as assembly of nanocubes and their associated photocatalytic activity

Zheng

Huang

Qin

et al. 2011

Journal of Colloid and Interface Science

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“…The idea that cations at the surface of the thin film may react with water, forming hydroxides, which readily decompose in the electric field, was proposed before. It is possible to remove the YBa 2 Cu 3 O 7−␦ thin films locally using a STM tip and a bias voltage of 1.5 V. 49 In the case of the SrTiO 3 thin films, ridges of several nanometer high were formed using a conductive AFM tip and a negative bias voltage in the range of 10-30 V. 50 In both cases transport of a large amount of material is thought to be possible due to the formation and decomposition of Ba͑OH͒ 2 and Sr͑OH͒ 2 .…”

Section: -8mentioning

confidence: 99%

Surface layer of SrRuO3 epitaxial thin films under oxidizing and reducing conditions

Młynarczyk

Szot

Petraru

et al. 2007

Journal of Applied Physics

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Imperfect stoichiometry and heterogeneity of a surface layer of SrRuO3 epitaxial thin films, grown on SrTiO3 substrates, are presented with the help of various methods. Rutherford backscattering spectroscopy, x-ray photoemission spectroscopy (XPS), and time of flight secondary ion mass spectrometry are used to obtain information about the stoichiometry and uniformity of the SrRuO3 structure. The temperature of chemical decomposition is first determined for polycrystalline samples under different conditions using thermogravimetry analysis. Then the determined values are used for thin film annealings in high and low oxygen pressure ambients, namely, air, vacuum, and hydrogen. The surface deterioration of the thin film together with changes in its electronic structure is investigated. O1s and Sr3d core lines measured by XPS for as-made samples obviously consist of multiple components indicating different chemical surroundings of atoms. Thanks to different incident beam angle measurements it is possible to distinguish between interior and surface components. Valence band spectra of the interior of the film are consistent with theoretical calculations. After annealing, the ratio of the different components changes drastically. Stoichiometry near the surface changes, mostly due to ruthenium loss (RuOX) or a segregation process. The width and position of the Ru3p line for as-made samples suggest a mixed oxidation state from metallic to fully oxidized. Long annealing in hydrogen or vacuum ambient leads to a complete reduction of ruthenium to the metallic state. Local conductivity atomic force microscopy scans reveal the presence of nonconductive adsorbates incorporated in the surface region of the film. Charge transport in these measurements shows a tunneling character. Scanning tunneling microscopy scans show some loose and mobile adsorbates on the surface, likely containing hydroxyls. These results suggest that an adequate description of a SrRuO3 thin film should take into account imperfections and high reactivity of its surface region.

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“…By increasing air humidity and applied voltage over a defined threshold a change in channel resistivity appears and, if the voltage is high enough, the vanishing of the current along the channel is observed [15]. AFM imaging of the channel after these operations indicate the appearance of a surface overgrowth in the regions subjected to the tip field.…”

Section: Resultsmentioning

confidence: 97%

“…Statistics done by performing scan lines in different conditions reveal that the height of the surface overgrowth increases with increasing applied voltage [15] to a limit value which is nearly equal to the film thickness. On the other end the efficiency of the growth and the width of the lines depends deeply on air humidity [16].…”

Section: Resultsmentioning

confidence: 98%

SrTiO3 Based Side Gate Field Effect Transistor Realized by Submicron Scale AFM Induced Local Chemical Reactions

Pellegrino¹,

Pallecchi²,

Siri³

et al. 2004

J Electroceram

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In this work we will show how it is possible to apply the so called nano-oxidation technique to pattern electrical circuits on oxygen deficient SrTiO 3 (STO) thin films. We will focus on two aspects: the chemical reactions which are triggered at the surface of oxygen deficient STO thin films by the voltage biased tip of an atomic force microscope (AFM) and the exploitation of this phenomenology to pattern insulating regions on oxygen deficient STO thin films in the submicron regime. Due to the insulating nature of the AFM modified regions and to the possibility to remove selectively the modified parts, planar electrical circuits entirely designed over STO thin films can be fabricated. A prototype of planar side gate field effect thin film transistor in which STO acts both as active channel and as gate electrode is presented and discussed.

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Fabrication of submicron-scale SrTiO3−δ devices by an atomic force microscope

Cited by 77 publications

References 27 publications

Facile synthesis of SrTiO3 hollow microspheres built as assembly of nanocubes and their associated photocatalytic activity

Facile synthesis of SrTiO3 hollow microspheres built as assembly of nanocubes and their associated photocatalytic activity

Surface layer of SrRuO3 epitaxial thin films under oxidizing and reducing conditions

SrTiO3 Based Side Gate Field Effect Transistor Realized by Submicron Scale AFM Induced Local Chemical Reactions

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