Fabrication of surface acoustic wave based wireless NO 2 gas sensor

Rana, Lokesh; Gupta, Vinay; Kshetrimayum, Roshan; Tomar, Monika; Gupta, Vinay

doi:10.1016/j.surfcoat.2017.10.077

Cited by 35 publications

(17 citation statements)

References 15 publications

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“…Table 2 illustrates the comparison of our developed sensitive layers with other sensing films SAW sensors reported in the literature for NOx target gas. It also shows that our materials can perform both mass and elastic detection for NO 2 and can reach similar and improved sub-ppm detection in comparison with the previous reported SAW sensors [ 13 , 14 , 15 , 16 ], within less than 1 min response time. Furthermore, our SAW sensors show excellent sensitivity by mass loading effect for carbon monoxide, ammonia, acetone and benzene, which can extend the environmental gas sensing applications.…”

Section: Resultssupporting

confidence: 70%

“…Surface acoustic wave (SAW) devices are a type of chemical sensor with high potentialities to detect low gas concentrations at room temperature (RT) due to the high sensitivity and reduced size. In addition, novel sensing applications open the possibility for custom SAW devices [ 13 , 14 , 15 , 16 , 17 ]. SAW sensors are mainly used as gravimetric (mass sensitive) transducers.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Carbon SH-SAW-Based Electronic Nose to Discriminate and Classify Sub-ppm NO2

Cruz

Matatagui

Ramírez

et al. 2022

Sensors

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In this research, a compact electronic nose (e-nose) based on a shear horizontal surface acoustic wave (SH-SAW) sensor array is proposed for the NO2 detection, classification and discrimination among some of the most relevant surrounding toxic chemicals, such as carbon monoxide (CO), ammonia (NH3), benzene (C6H6) and acetone (C3H6O). Carbon-based nanostructured materials (CBNm), such as mesoporous carbon (MC), reduced graphene oxide (rGO), graphene oxide (GO) and polydopamine/reduced graphene oxide (PDA/rGO) are deposited as a sensitive layer with controlled spray and Langmuir–Blodgett techniques. We show the potential of the mass loading and elastic effects of the CBNm to enhance the detection, the classification and the discrimination of NO2 among different gases by using Machine Learning (ML) techniques (e.g., PCA, LDA and KNN). The small dimensions and low cost make this analytical system a promising candidate for the on-site discrimination of sub-ppm NO2.

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Section: Resultssupporting

confidence: 70%

Section: Introductionmentioning

confidence: 99%

Carbon SH-SAW-Based Electronic Nose to Discriminate and Classify Sub-ppm NO2

Cruz

Matatagui

Ramírez

et al. 2022

Sensors

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show abstract

“…Table 4 shows some of the SAW NO x sensors reported in the literature. (36)(37)(38) Compared with other SAW sensors in early works, the frequency response in the present work is significant towards 20 ppb NO concentration. Hence, the present EWC/SPUDT SAW sensor coated with a Cu 2+ /PANI/WO 3 layer is able to sensitively detect NO gas concentrations of the order of partsper-billion at room temperature.…”

Section: Saw Sensormentioning

confidence: 72%

Enhanced Sensitive Surface Acoustic Wave Device Designed for Nitric Oxide Gas Detection

Chung¹,

Hwang²,

Chiu³

et al. 2019

Sensors and Materials

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Surface acoustic wave (SAW) devices equipped with an electrode-width-controlled (EWC)/ single-phase unidirectional transducer (SPUDT) and fabricated on ST-X quartz were proposed and found to have low insertion loss and single-mode capability. The devices were then used to determine parts-per-billion levels of nitric oxide (NO). A new modified equivalent circuit (EC) model was used to model and analyze the characteristics of SAW devices prior to their fabrication. The small-signal frequency responses (S 21) obtained by simulation and measurement were consistent. A feedback-loop oscillator was used to design SAW-resonatorstabilized oscillators that provided stable oscillation. A SAW oscillator with an EWC/SPUDT structure was used to provide fundamental signals with high output power, induce high harmonic suppression, and realize long-term frequency stability. SAW devices with an EWC/ SPUDT structure were coated with a Cu 2+ /PANI/WO 3-sensitive layer to successfully determine parts-per-billion levels of NO. For a NO concentration of 50 ppb in dry air, the frequency shift in the SAW sensor with the EWC/SPUDT structure is 502 Hz. Moreover, the response and recovery time are 40 and 112 s, respectively. The sensitivity of NO detection for a concentration range of 20-80 ppb is approximately 4.2 Hz/ppb (~3.43 kHz/mg/m 3).

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“…PZT brings benefits such as chemical stability, physical strength, and low-cost manufacturing. In 2018, the same group [87] proposed PZT to replace the ZnO thin film for NO 2 gas detection, because PZT is also able to enhance the coupling coefficient of the SAW device. The 100 nm PZT layer was obtained via pulsed laser deposition (PLD) technique.…”

Section: Metal Oxide Semiconductors (Mos) For No 2 Sensingmentioning

confidence: 99%

Recent Progress on Nanomaterials for NO2 Surface Acoustic Wave Sensors

2022

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NO2 gas surface acoustic wave (SAW)sensors are under continuous development due to their high sensitivity, reliability, low cost and room temperature operation. Their integration ability with different receptor nanomaterials assures a boost in the performance of the sensors. Among the most exploited nano-materials for sensitive detection of NO2 gas molecules are carbon-based nanomaterials, metal oxide semiconductors, quantum dots, and conducting polymers. All these nanomaterials aim to create pores for NO2 gas adsorption or to enlarge the specific surface area with ultra-small nanoparticles that increase the active sites where NO2 gas molecules can diffuse. This review provides a general overview of NO2 gas SAW sensors, with a focus on the different sensors’ configurations and their fabrication technology, on the nanomaterials used as sensitive NO2 layers and on the test methods for gas detection. The synthesis methods of sensing nanomaterials, their functionalization techniques, the mechanism of interaction between NO2 molecules and the sensing nanomaterials are presented and discussed.

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Fabrication of surface acoustic wave based wireless NO 2 gas sensor

Cited by 35 publications

References 15 publications

Carbon SH-SAW-Based Electronic Nose to Discriminate and Classify Sub-ppm NO2

Carbon SH-SAW-Based Electronic Nose to Discriminate and Classify Sub-ppm NO2

Enhanced Sensitive Surface Acoustic Wave Device Designed for Nitric Oxide Gas Detection

Recent Progress on Nanomaterials for NO2 Surface Acoustic Wave Sensors

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