Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield

Sivasundari, K.; Sugantharathnam, D. Mary; Daniel, R. Joseph

doi:10.1007/s00542-019-04388-1

Cited by 9 publications

(3 citation statements)

References 18 publications

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“…Printing or coating processes can provide the low-cost fabrication of flexible, large-area electronic devices, compared to MEMS 29,30 or semiconductor processes. 31,32 Air-gap structures are often found in MEMS touch sensors 33,34 and they are designed to sense external force by detecting deformation of a component placed on the air-gap. In general, air-gap structures are fabricated by the etching process in MEMS fabrication.…”

Section: ■ Introductionmentioning

confidence: 99%

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Fabrication and Characterization of Roll-to-Roll-Coated Cantilever-Structured Touch Sensors

Lee

2020

ACS Appl. Mater. Interfaces

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It is common in the field of printed electronics that polydimethylsiloxane (PDMS) be used as a dielectric layer for capacitive sensors because of its high elasticity and restoration force. However, capacitive sensors with the PDMS dielectric layer have a lower sensitivity than those with an air-gap structure that has been fabricated by the conventional micro-electromechanical system (MEMS) process. This paper presents a productive method for fabricating air-gap structures for touch sensors by roll-to-roll slot-die coating. The air-gap is formed by coating and removing a sacrificial layer. Cantilever-structured capacitive touch sensors with an air-gap are fabricated as follows: First, the bottom electrode, the dielectric layer, and the poly(vinyl alcohol) (PVA) sacrificial layer are roll-to-roll slot-die-coated on a flexible substrate. In addition, the spacer layer is spin-coated. On the sacrificial and spacer layers, the top electrode and structural layer are formed by spin-coating. Then, the air-gap and cantilever structure are made by removing the sacrificial layer in water. The cantilever-structured sensor samples are examined in terms of sensitivity, hysteresis, and repeatability. In particular, the electrical performance of the samples is compared to those with the PDMS dielectric layer. Experimental results show that the cantilever-structured sensor samples have significantly higher sensitivity compared to those with the PDMS dielectric layer.

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Section: ■ Introductionmentioning

confidence: 99%

“…Air-gap structures are often found in MEMS touch sensors , and they are designed to sense external force by detecting deformation of a component placed on the air-gap. In general, air-gap structures are fabricated by the etching process in MEMS fabrication.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of Roll-to-Roll-Coated Cantilever-Structured Touch Sensors

Lee

2020

ACS Appl. Mater. Interfaces

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“…Capacitive acceleration sensors can have a cantilever [ 20 , 21 ], sandwich [ 22 , 23 ] or comb [ 24 , 25 ] structure and the structures are made to contain an air gap. Air gaps are commonly formed by etching in MEMS [ 26 , 27 ]. When an acceleration occurs in a capacitive acceleration sensor, the mass placed on or beside the air gap moves in the opposite direction of the acceleration by inertia.…”

Section: Introductionmentioning

confidence: 99%

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

Lee

2020

Sensors

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This paper presents the fabrication by means of roll-to-roll slot-die coating and characterization of air gap-based cantilever type capacitive acceleration sensors. As the mass of the sensor moves in the opposite direction of the acceleration, a capacitance change occurs. The sensor is designed to have a six layers structure with an air gap. Fabrication of the air gap and cantilever was enabled by coating and removing water-soluble PVA. The bottom electrode, the dielectric layer, and the sacrificial layer were formed using the roll-to-roll slot-die coating technique. The spacer, the top electrode, and the structural layer were formed by spin coating. Several kinds of experiments were conducted for characterization of the fabricated sensor samples. Experimental results show that accelerations of up to 3.6 g can be sensed with an average sensitivity of 0.00856 %/g.

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Design and Simulation of Digital Output MEMS Pressure Sensor

Paliwal

Yenuganti

2020

Arab J Sci Eng

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Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield

Cited by 9 publications

References 18 publications

Fabrication and Characterization of Roll-to-Roll-Coated Cantilever-Structured Touch Sensors

Fabrication and Characterization of Roll-to-Roll-Coated Cantilever-Structured Touch Sensors

Cantilever Type Acceleration Sensors Made by Roll-to-Roll Slot-Die Coating

Design and Simulation of Digital Output MEMS Pressure Sensor

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