Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1?x?yZrxHfyO2 for Bandgap Engineering

Yamada, Yasuhiro; Fukumura, Tomoteru; Ikeda, Masahiro; Ohtani, Maki; Toyosaki, H.; Ohtomo, Akira; Matsukura, F.; Ohno, Hideo; Kawasaki, Masashi

doi:10.1007/s10948-005-2160-x

Cited by 12 publications

(13 citation statements)

References 9 publications

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“…2(b), uses sources that give a uniform flux to the substrate and a contact mask, which slides across the substrate surface to vary the effective deposition time, and thus, the thickness at different locations on the substrate. [21][22][23] The CSAFs are generated by sequential deposition of components with gradients in different directions. One of the limitations of this method is that the components cannot be codeposited and subsequent annealing may not lead to complete mixing, unless each layer is no more than one atomic monolayer in thickness.…”

Section: Methods For Preparation Of Csafsmentioning

confidence: 99%

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Fleutot¹,

Miller²,

Gellman³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Composition spread alloy films (CSAFs) are materials libraries used for high throughput investigations of multicomponent materials such as alloys, AxByC1−x−y. CSAFs are prepared such that the alloy film has a lateral spatial gradient in its local composition; thus, they include a set of alloy samples with a distribution of compositions that spans a continuous region of composition space (x,y). A tool based on the shadow mask concept has been developed for generating composition gradients, but modified to allow rotation of the shadow mask during CSAF deposition. The tool allows deposition of CSAFs containing up to four elements with rotatable shadow masks between each of the four electron beam evaporation sources and the deposition substrate. This allows codeposition of any combination of up to four components. In the case of the ternary AxByC1−x−y CSAFs, the three components can be deposited such that the resulting CSAF spans the entire ternary alloy composition space (x = 0 → 1, y = 0 → 1 − x) and, furthermore, contains all three binary alloys AxB1−x, AxC1−x, and BxC1−x (x = 0 → 1) and all three pure components. The innovation of the rotatable shadow masks also allows preparation of CSAFs that magnify selected regions of the composition space (x = xmin → xmax, y = ymin → 1 − x). Herein, we describe the design and performance of this new CSAF deposition tool and assess its merits and limitations with respect to other methods for CSAF preparation.

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Section: Methods For Preparation Of Csafsmentioning

confidence: 99%

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Fleutot¹,

Miller²,

Gellman³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…High-throughput experimentation continues to play an important role in deciphering the exact mechanism by which doped magnetic species brings about ferromagnetism. 119,120 C. Magnetic metallic alloys and magnetic phase diagrams…”

mentioning

confidence: 99%

Applications of high throughput (combinatorial) methodologies to electronic, magnetic, optical, and energy-related materials

Green

Takeuchi

Hattrick‐Simpers

2013

Journal of Applied Physics

227

189

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High throughput (combinatorial) materials science methodology is a relatively new research paradigm that offers the promise of rapid and efficient materials screening, optimization, and discovery. The paradigm started in the pharmaceutical industry but was rapidly adopted to accelerate materials research in a wide variety of areas. High throughput experiments are characterized by synthesis of a "library" sample that contains the materials variation of interest (typically composition), and rapid and localized measurement schemes that result in massive data sets. Because the data are collected at the same time on the same "library" sample, they can be highly uniform with respect to fixed processing parameters. This article critically reviews the literature pertaining to applications of combinatorial materials science for electronic, magnetic, optical, and energy-related materials. It is expected that high throughput methodologies will facilitate commercialization of novel materials for these critically important applications. Despite the overwhelming evidence presented in this paper that high throughput studies can effectively inform commercial practice, in our perception, it remains an underutilized research and development tool. Part of this perception may be due to the inaccessibility of proprietary industrial research and development practices, but clearly the initial cost and availability of high throughput laboratory equipment plays a role. Combinatorial materials science has traditionally been focused on materials discovery, screening, and optimization to combat the extremely high cost and long development times for new materials and their introduction into commerce. Going forward, combinatorial materials science will also be driven by other needs such as materials substitution and experimental verification of materials properties predicted by modeling and simulation, which have recently received much attention with the advent of the Materials Genome Initiative. Thus, the challenge for combinatorial methodology will be the effective coupling of synthesis, characterization and theory, and the ability to rapidly manage large amounts of data in a variety of formats. V C 2013 AIP Publishing LLC. [http://dx

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“…First, the simple masking scheme used here to localize the deposition on the substrate allows a tight control of the local composition and thickness. In previous published work using shadow masks, the masking scheme was quite complex [21,22], implying a very difficult control of both the composition and the thickness over the library. Hence, the reported local composition in ref [21] was off nominal, with no mention of the thickness uniformity, while in most studies, a comparison between actual and nominal local compositions is not even addressed [29].…”

Section: Discussionmentioning

confidence: 99%

“…Our goal is to investigate the tunability properties of compositions in the BaTiO 3 -BaZrO 3 -CaTiO 3 ternary phase diagram (BCTZ) in thin film libraries using combinatorial pulsed laser deposition (CPLD). It is appealing to try synthesizing an entire ternary phase diagram on a single substrate using three targets with CPLD [21]. This approach, however, requires complex masking schemes and a uniform deposition rate across the substrate in order to control local compositions and thicknesses [22].…”

Section: Introductionmentioning

confidence: 99%

Tunability Investigation in the BaTiO3-CaTiO3-BaZrO3 Phase Diagram Using a Refined Combinatorial Thin Film Approach

et al. 2021

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Tunable ferroelectric capacitors, which exhibit a decrease in the dielectric permittivity under an electric field, are widely used in electronics for RF tunable applications. Current devices use barium strontium titanate (BST) as the tunable dielectric, but new applications call for tunable materials with specific performance improvements. It is then of crucial importance to dispose of a large panel of electrically characterized materials to identify the most suited compound for a given set of device specifications. Here, we report on the dielectric tuning properties of Ba1−xCaxTi1−yZryO3 (BCTZ) thin films libraries (0 ≤ x ≤ 30% and 0 ≤ y ≤ 28.5%) synthesized by combinatorial pulsed laser deposition (CPLD). An original CPLD approach allowing reliable and statistical ternary phase diagrams exploration is reported. The effects of Ca and Zr content on tunability, breakdown voltage and dielectric losses are explicated and shown to be beneficial up to a certain amount. Compounds close to (Ba0.84Ca0.16)(Ti0.8Zr0.2)O3 exhibit the highest figures of merit, while a zone with compositions around (Ba0.91Ca0.09)(Ti0.81Zr0.19)O3 show the best compromise between tuning ratio and figure of merit. These results highlight the potential of BCTZ thin films for electrically tunable applications.

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Fabrication of Ternary Phase Composition-Spread Thin Film Libraries and Their High-Throughput Characterization: Ti1?x?yZrxHfyO2 for Bandgap Engineering

Cited by 12 publications

References 9 publications

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Applications of high throughput (combinatorial) methodologies to electronic, magnetic, optical, and energy-related materials

Tunability Investigation in the BaTiO3-CaTiO3-BaZrO3 Phase Diagram Using a Refined Combinatorial Thin Film Approach

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