2011
DOI: 10.1117/12.892866
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Fabrication of the micro accelerator platform for x-ray applications

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“…Furthermore, microfabrication techniques driven by the semiconductor industry have advanced to the point of feasible fabrication of DLA microstructures [52][53][54]. The µm-scale wavelength results in feature sizes of order 400 nm: such structures are readily fabricated using conventional ultraviolet lithography.…”
Section: Historical Contextmentioning
confidence: 99%
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“…Furthermore, microfabrication techniques driven by the semiconductor industry have advanced to the point of feasible fabrication of DLA microstructures [52][53][54]. The µm-scale wavelength results in feature sizes of order 400 nm: such structures are readily fabricated using conventional ultraviolet lithography.…”
Section: Historical Contextmentioning
confidence: 99%
“…The bandpass of the resonant structure was demonstrated from optical transmission through the structure [58]. Electron beam tests were performed at the E-163 experimental endstation at SLAC with a 60 MeV beam and 100 fs Ti:Sapphire laser pulses [52,58,59,148].…”
Section: Resonant Structuresmentioning
confidence: 99%