Fabrication of the nanocrystal structures ZrO 2 (y):Zr and SiO 2 :Si(p) by ion implantation

Горшков, О. Н.; Филатов, Д. О.; Касаткин, А. П.; Новиков, В. А.; Tetelbaum, D. I.; Trushin, Sergey; Stepihova, M. V.

doi:10.1117/12.347432

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“…The absorption band of spectrum 1 is assigned to the formation of nc Zr particles. Indeed, it was previ ously established that the appearance of this band with a maximum at ~2.5 eV in the spectra of YSZ samples irradiated by helium ions [6,7] and zirconium ions [8] corresponded to the presence of nc Zr particles in the samples. A specific feature of the formation of nc Zr particles from matrix cations in the case under consid eration is that these nanoparticles are formed from Zr atoms knocked out of the crystalline lattice sites in the course of bombardment with Au ions.…”

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Peculiarities in the formation of gold nanoparticles by ion implantation in stabilized zirconia

et al. 2012

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At present, considerable interest of researchers is devoted to the creation of polyfunctional nanostruc tured dielectric matrices containing dispersed nanoc rystalline metal (nc M) particles [1][2][3]. The presence of nc M particles in dielectric matrices significantly expands their functional properties by modifying opti cal nonlinearity and absorption characteristics, ensur ing sensitization of optically active centers, and intro ducing one electron and plasmon effects. The forma tion of nc M particles and the properties of related nanostructured materials have been studied in detail only for some (e.g., SiO 2 and Al 2 O 3 ) matrices [1,2]. The presence of nc M particles in dielectric matrices leads to the appearance of characteristic bands related to plasmon excitations in the optical absorption spec tra. The formation of complex absorption bands can be related to the presence of nanoparticles with vari able and complex compositions [1,2] or closely spaced nc M particles (dimers [4]) with substantially different dimensions.A promising class of oxide matrices is represented by fianites (in particular, stabilized zirconia), which is characterized by high mobility of oxygen ions [5]. The formation of nc M (nc Zr) particles in stabilized zir conia has been originally reported in [6][7][8]. It was demonstrated [6,7,9] that metal nanoclusters can be self assembled from matrix cations in the course of irradiation by light ions. At the same time, the forma tion of nc M particles in this matrix during ion implantation is still insufficiently studied. In particu lar, it is not completely clear whether matrix cations can participate in the formation of nc M particles dur ing the implantation of metal ions such as Au, Ag, etc.Previously, we have considered [9, 10] this issue in studying the optical properties of yttria stabilized zir conia (YSZ) irradiated by gold (Au) ions. In the present work, the possible participation of matrix cat ions in the formation of nc M particles during the implantation of Au ions into bulk single crystals and films of YSZ have been studied by optical spectroscopy techniques and transmission electron microscopy (TEM).The experiments were performed on YSZ single crystals containing 12 mol % yttria, which had been synthesized in the Prokhorov Institute of General Physics (Moscow) by direct RF induction melting in cold crucibles [5]. For structural investigations, nc M particles were also formed in YSZ films deposited by RF magnetron sputtering onto fused silica substrates. The structure of sputter deposited films was checked by X ray diffraction (XRD) measurements performed on DRON 3 diffractometer in a grazing incidence mode. The XRD patterns displayed peaks that could be assigned to a cubic zirconia phase. The film thick ness was ~80 nm, and the content of a stabilizing phase was the same as that in single crystals.The YSZ samples were irradiated by Au ions to a dose of 5 × 10 15 or 4 × 10 16 cm -2 on a Raduga 3 setup [11] operating in a pulsed regime at an ion beam cur rent of 12 μA/cm 2 , an...

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“…The formation of nc M (nc Zr) particles in stabilized zir conia has been originally reported in [6][7][8]. It was demonstrated [6,7,9] that metal nanoclusters can be self assembled from matrix cations in the course of irradiation by light ions.…”

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confidence: 99%