In order to realize the sterilization of the medical implements packed by a sterilization bag or medical implements of a complicated structure with tiny gaps, application of the long-lifetime oxygen active species were investigated using H 2 O-O 2 plasma.By the sterilization experiment using BI with the spore of Geobacillus stearothermophilus ATCC 7953 with high heat resistance, it was found that the more the partial pressures of H 2 O and O 2 increased, the more the shorter the required irradiation time for sterilization became. Sterilization time for BI enclosed in the sterilization bag was 15 minutes, when the partial pressure of H 2 O and O 2 were made equal and the total pressure was set to 150 Pa. From the emission spectrum diagnostic result, the reduction of emission intensity based on ・OH or ・O was confirmed with pressure increase, and it suggested that the formation of ・O 2 -was dominant with the total pressure of 150 Pa or more.