Fabrication of Thick Metal Absorber With Overhanging Structure for TESs

Lee, Young Hwa; Bae, Jai Beom; Kim, Il Hwan; Kim, Y. H.; Lee, Hwa Yong; Lee, Kyoung Beom; Lee, Jun Young; Lee, Sang Jun

doi:10.1109/tasc.2009.2019565

Cited by 6 publications

(1 citation statement)

References 12 publications

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“…With electrothermal feedback, the theoretical energy resolution is given by where n is typically between three and five, where k B and C are the Boltzmann constant, the effective heat capacity of the TES microcalorimeter, respectively [10]. Several types of mushroom-shaped absorber have been developed in an attempt to increase the sensitive area of the TES microcalorimeter [11]- [13]. The operational performance of the microcalorimeter is affected by the deformation of the overhanging structure.…”

Section: -Pixel-array Tes Microcalorimeter With a Mushroom Shaped Abmentioning

confidence: 99%

Response of a Superconducting Transition-Edge Sensor Microcalorimeter with a Mushroom-shaped Absorber to L X-rays Emitted by Transuranium Elements

Maehata

Maeda

Iyomoto

et al. 2015

IEICE Trans. Electron.

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SUMMARY A four-pixel-array superconducting transition-edge sensor (TES) microcalorimeter with a mushroom-shaped absorber was fabricated for the energy dispersive spectroscopy performed on a transmission electron microscope. The TES consists of a bilayer of Au/Ti with either a 50-nm or 120-nm thickness. The absorber of 5.0 µm thick is made from a Au layer and its stem is deposited in the center of the TES surface. A Ta 2 O 5 insulating layer of 100-nm thickness is inserted between the overhang region of the absorber and the TES surface. A selected pixel of the TES microcalorimeter was operated for the detection of Np L X-rays emitted from an 241 Am source. A response of the TES microcalorimeter to L X-rays was obtained by analyzing detection signal pulses with using the optimal filter method. An energy resolution was obtained to be 33 eV of the full width at half maximum value at 17.751 keV of Np L β1 considering its natural width of 13.4 eV. Response to L X-rays emitted from a mixture source of 238 Pu, 239 Pu and 241 Am was obtained by operating the selected pixel of the TES microcalorimeter. Major L X-ray peaks of progeny elements of α decay of Pu and Am isotopes were clearly identified in the obtained energy spectrum. The experimental results demonstrated the separation of 241 Am and plutonium isotopes by L X-ray spectroscopy. key words: TES microcalorimeter, Mushroom shaped absorber, X-ray response, Energy Resolution, L X-ray spectroscopy

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Section: -Pixel-array Tes Microcalorimeter With a Mushroom Shaped Abmentioning

confidence: 99%

Response of a Superconducting Transition-Edge Sensor Microcalorimeter with a Mushroom-shaped Absorber to L X-rays Emitted by Transuranium Elements

Maehata

Maeda

Iyomoto

et al. 2015

IEICE Trans. Electron.

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Introduction to Quantum Sensors in Cryogenic Particle Detection

Kim

2012

Convergence of Terahertz Sciences in Biomedical Systems

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Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

et al. 2012

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A 3 × 3 + 1 superconducting transition-edge sensor (TES) microcalorimeter-array has been developed for the energy dispersive spectrometer performed on a transmission electron microscope. For increasing sensitive area, each TES microcalorimeter consisted of a Ti/Au bilayer and a mushroom shaped absorber. The mushroom shaped absorber is made from a Au layer of 0.5 µm thick. Geometrical dimensions of the surface area of the TES and the absorber are 350 µm × 350 µm and 330 µm × 330 µm, respectively. The absorber stem of 150 µm × 150 µm in the cross sectional area is deposited on the center of the TES surface. A Ta 2 O 5 insulating layer of 0.1 µm thick is inserted between the overhang layer of the absorber and the TES surface. One pixel of the TES microcalorimeter was operated for detecting X-ray photons emitted from an 55 Fe source.

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Fabrication of Thick Metal Absorber With Overhanging Structure for TESs

Cited by 6 publications

References 12 publications

Response of a Superconducting Transition-Edge Sensor Microcalorimeter with a Mushroom-shaped Absorber to L X-rays Emitted by Transuranium Elements

Response of a Superconducting Transition-Edge Sensor Microcalorimeter with a Mushroom-shaped Absorber to L X-rays Emitted by Transuranium Elements

Introduction to Quantum Sensors in Cryogenic Particle Detection

Development of a TES Microcalorimeter with a Mushroom Shaped Absorber Deposited on an Insulating Layer in an Overhang Region

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