Fabrication of Thin-Film Phase Grating Using Surface Acoustic Waves

Abstract

By depositing a thin film on a substrate in which a standing surface wave is excited, we fabricated a phase grating in which variations in the film thickness as well as the refractive index occurred at half the wavelength of the surface acoustic waves. As no such phenomenon has been reported until now, its application for optical elements is expected.

Two-Dimensional Patterning of Inorganic Particles in Resin Using Ultrasound-Induced Plate Vibration

“…As for the applications using a standing wave of a surface acoustic wave excited on a substrate, Nakagawa and coworkers fabricated a thin-film phase grating and attained an energyefficient optical modulator. [14][15][16][17][18][19] The two-dimensional pattern was hardened with UV irradiation for 5 min using a black light (Toshiba EFD15BLB, 15 W). The UV hardening process is based on photopolymerization, which means phase change from monomer to polymer triggered by UV light.…”