2012
DOI: 10.1364/oe.20.009415
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Fabrication of three dimensional split ring resonators by stress-driven assembly method

Abstract: We demonstrate a self-assembly strategy for fabricating three dimensional (3D) metamaterials. This strategy represents the desired 3D curving prongs of the split ring resonators (SRRs) erected by metal stress force with appropriate thin film parameters. Transmittance spectra and field patterns corresponding to each resonance modes are calculated by finite element method (FEM). The eigen-modes of the SRRs can be excited by normal illumination with polarization state parallel to the erected SRRs, which are unlik… Show more

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Cited by 55 publications
(45 citation statements)
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“…Many micro/nano fabrication techniques featuring 3D structures that could be applied to photonic and MMs have been developed in recent years. These techniques include layer-by-layer stacking 3,14,15 , structural rolling 16,17 , shadow evaporation 18 , multilayer electroplating 19 , membrane projection lithography 20,21 , stress-driven assembly 22 , direct laser writing 8,[23][24][25][26][27][28] , and ion-beam irradiation [29][30][31] . However, effective fabrication of nanoscale 3D plasmonic structures that can be spatially oriented with a hierarchical geometry remains challenging.…”
Section: Introductionmentioning
confidence: 99%
“…Many micro/nano fabrication techniques featuring 3D structures that could be applied to photonic and MMs have been developed in recent years. These techniques include layer-by-layer stacking 3,14,15 , structural rolling 16,17 , shadow evaporation 18 , multilayer electroplating 19 , membrane projection lithography 20,21 , stress-driven assembly 22 , direct laser writing 8,[23][24][25][26][27][28] , and ion-beam irradiation [29][30][31] . However, effective fabrication of nanoscale 3D plasmonic structures that can be spatially oriented with a hierarchical geometry remains challenging.…”
Section: Introductionmentioning
confidence: 99%
“…The VSRR is described by the fi rst circuit driven by V in (t) = Ve -i ω t which describes the in-coupling effect of the incident light. The HSRRs, on the other hand, can be excited via the induced magnetic fi eld of VSRR, thus the coupling mechanism between the fi rst circuit and other two circuits is accounted for as mutual inductance M 21 and M 31 . With the identical geometric dimensions of the three SRRs inside a metamolecule unit cell, their inductance and capacitance are set as equal …”
Section: Resultsmentioning
confidence: 99%
“…A split-ring resonator (SRR) is one of the most commonly adopted structure units to construct plasmonic metamaterials [7][8][9][10]. For such SRR-based metamaterials, when the incident light hits the plasmonic resonance(s) of an individual SRR, the effective permeability/permittivity of the whole medium are then efficiently changed, depending on the nature of resonance [11].…”
Section: Introductionmentioning
confidence: 99%