Fabrication of TiNi shape memory micropump

Makino, Eiji; Mitsuya, Takashi; Shibata, Takayuki

doi:10.1016/s0924-4247(00)00522-7

Cited by 182 publications

(83 citation statements)

References 16 publications

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“…In contrast with many works which consider bending of bi-layer films consisting of a transforming (active) film on a passive substrate (e.g. see recent paper [1][2][3][4] ) we consider films or plates containing more than two active and passive layers.…”

Section: Introductionmentioning

confidence: 99%

Theory of Multilayer SMA Actuators

Roytburd

Slutsker

2002

Mater. Trans.

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Two types of multilayer actuators based on a shape memory alloy (SMA) film as an active component are explored theoretically. One of them uses the bending of an actuator due to the movement of an austenite/martensite interface of a SMA film parallel to a film plane. Another type of actuation uses the combination of passive layers with different coefficients of thermal expansion for engineering curvature. It is shown that in both cases the actuating deformation of the multilayer actuators can be optimized by the combination of the layers with different elastic properties, misfits and thickness.

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Section: Introductionmentioning

confidence: 99%

Theory of Multilayer SMA Actuators

Roytburd

Slutsker

2002

Mater. Trans.

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“…(19). However, there is no evidence to see the existence of internal stresses in the experiment of Makino et al 15,16) …”

Section: Comparison With Experimentsmentioning

confidence: 96%

“…It includes the evacuation and pressurization types. 16) Suppose a hydrostatic pressure p (h) is applied on the lower surface of the film. The total energy of such a film per unit film thickness is e (h)…”

Section: Theorymentioning

confidence: 99%

“…Finally, Makino et al 15,16) have successfully fabricated a Ti-Ni actuated micropump with pumping pressure up to several hundreds of kPa. The measured ratio of deflection to the half-edge length of the Ti-Ni diaphragm is about 0.04.…”

Section: Comparison With Experimentsmentioning

confidence: 99%

“…Our work was motivated by the recent experiment on the fabrication of SMA actuated micropumps. 16,17,26) They have reported that a Ti-Ni micropump exhibits the largest work out per cycle per unit volume amongst various common actuator systems. 26) However, the ratio of the deflection to the half-edge length of diaphragm has been observed around several values from 0.04 to 0.12 which only correspond to 0.2%-1.4% small strain.…”

Section: Introductionmentioning

confidence: 99%

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Shape-Memory Micropumps

Shu

2002

Mater. Trans.

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Motivated by many experimental efforts to develop suitable shape-memory micropumps, we propose a multiscale framework to study the behavior of pressurized films. We use recoverable deflection as a measure to design large stroke micropumps and develop a model to estimate it. We show that the recoverable deflection of a polycrystalline shape-memory film depends on the transformation strain of the underlying martensitic transformation, the texture and especially on the size effects. We find that flat grains are preferable to long grains in columnar films concerning the purpose of large recoverable strain. We also show that common sputtering texture is not ideal for recoverable deflection in both Ti-Ni and Cu-based shape-memory films. It turns out that {100} Cu-based films may have better behavior than Ti-Ni films. We conclude with comparison with experiment.

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