Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

Abstract

A simple and efficient optical interference method for fabricating high quality two- and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 90 masculine and 60 masculine between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals.

Holographic Fabrication of Three-Dimensional Woodpile-Type Photonic Crystal Templates Using Phase Mask Technique

“…By using a 4-beam interference setup, a pattern with 3D symmetry can be designed. (Shoji et al, 2003;Lai et al, 2005) Hence, by selecting different beam combinations, and even performing some pattern translations, patterns with different lattice symmetries are possible to make.…”

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

“…Finally, a fifth wavefront-splitting option is depicted in Figure 5(e), employing a double-iris amplitude mask to define the individual beams, while providing the opportunity for individual beam conditioning and wavevector control [133][134][135].…”

Fabrication of submicron metallic grids with interference and phase-mask holography

“…[10][11][12][13] Interference holography uses an interference pattern rather than a photomask. New methods of making narrow metallic mesh structures having more open area using diffractive phase masks have been developed.…”