Fabrication of ultrathin color filters for three primary colors using guided-mode resonance in silicon subwavelength gratings

Kanamori, Yoshiaki; Ozaki, Toshikazu; Hane, Kazuhiro

doi:10.1007/s10043-014-0118-6

Cited by 10 publications

(6 citation statements)

References 23 publications

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“…The grating period is smaller than the resonant wavelength and does not generate higher‐order diffracted waves. GMRG, which consists of a material without absorption loss, theoretically has 100% reflectance at the resonant wavelength [60–93]. For incident light other than the resonant wavelength, the GMRG behaves as a uniform medium with an effective refractive index according to the characteristics of SWG.…”

Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

“…Therefore, it is difficult to fabricate GMRG of the three primary colors on the same substrate in one patterning process. The author demonstrated reflective color filters that reproduce three primary colors using two‐dimensional silicon GMRG in a triangular lattice arrangement on the same quartz substrate [63]. The thickness of all color filters is the same, 100 nm, which is very thin, allowing easy manufacture of color filter arrays.…”

Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

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High‐Efficiency Optical Filters Based on Nanophotonics

Kanamori

2021

IEEJ Transactions Elec Engng

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Nanophotonic structures are artificial optical substances composed of structures smaller than incident light wavelengths. For example, it can artificially create a unique refractive index that is not found in substances in the natural world. That is, by designing the shape of the nanophotonic structure, an optical filter device that exhibits an optical response on demand can be realized. Also, we can realize applied devices with useful functions that cannot be realized by substances existing in nature, such as antireflective surfaces with 0% reflectance, wavelength-selective filters with 100% reflectance at specific wavelengths, and filters that shift the resonant wavelength in response to changes in the ambient refractive index. There can be applications to highbrightness light-emitting elements, high-efficiency power generation elements, color filters for full-color high-resolution cameras, miniature spectroscopic systems, high-efficiency biosensors, and so on. In the future, the development of further applications with this technology is widely expected in the fields of information, energy and global environment, and medical care and welfare. This paper describes high-efficiency optical filters based on nanophotonic technologies.

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Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

Section: Application Of Nanophotonic Optical Filtersmentioning

confidence: 99%

High‐Efficiency Optical Filters Based on Nanophotonics

Kanamori

2021

IEEJ Transactions Elec Engng

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“…Кремниевые нанопиллары (Si НП) характеризуются необычными оптическими и фотоэлектрическими свойствами [1][2][3][4][5][6]. Особый интерес к этим структурам обусловлен возможностью реализации на их основе оптических фильтров и цветной печати высокого разрешения [7,8]. Цветной фильтр на отражение на основе субмикрометровой решетки Si НП имеет узкую полосу пропускания с малой чувствительностью к углу падения света [9].…”

Section: Introductionunclassified

Микромассивы Кремниевых Нанопилларов: Формирование И Резонансное Отражение Света

Басалаева¹,

Настаушев²,

Дульцев³

et al. 2019

Физика И Техника Полупроводников

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—The results of investigating the spectral characteristics of reflection from silicon nanopillar (Si NP) microarrays in the wavelength region from 400 to 1100 nm are presented. The Si nanopillars are formed by electron lithography on a negative resist with subsequent reactive ion etching. The Si nanopillars are etched through a resist mask and SiO_2 100 nm thick. In the spectra of reflection from nanopillar microarrays, minima are observed, the position of which depends strongly on the Si nanopillar diameter.

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“…Therefore, to improve filter array spectroscope devices, the improvement of the filter characteristics itself is required. Although guided-mode resonant gratings are known as high-efficiency wavelength selective filters [ 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ], they function as reflection type wavelength selective filters. Transmission type wavelength selective filters are necessary for application in filter array spectroscopes.…”

Section: Introductionmentioning

confidence: 99%

Miniature Spectroscopes with Two-Dimensional Guided-Mode Resonant Metal Grating Filters Integrated on a Photodiode Array

2018

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A small spectroscope with 25 color sensors was fabricated by combining metamaterial color filters and Si photodiodes. The metamaterial color filters consisted of guided-mode resonant metal gratings with subwavelength two-dimensional periodic structures. Transmittance characteristics of the color filters were designed to obtain peak wavelengths proportional to grating periods. For each color sensor, a peak wavelength of the spectral sensitivity could be tuned in the range of visible wavelengths by adjusting each grating period. By performing spectrum reconstruction using Tikhonov regularization, the spectrum of an incident light was obtained from the signal of photodiodes. Several monochromatic lights were made incident on the fabricated device and the spectral characteristics of the incident light were reconstructed from the output signals obtained from the respective color sensors. The peak wavelengths of the reconstructed spectra were in good agreement with the center wavelengths of the monochromatic lights.

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Fabrication of ultrathin color filters for three primary colors using guided-mode resonance in silicon subwavelength gratings

Cited by 10 publications

References 23 publications

High‐Efficiency Optical Filters Based on Nanophotonics

High‐Efficiency Optical Filters Based on Nanophotonics

Микромассивы Кремниевых Нанопилларов: Формирование И Резонансное Отражение Света

Miniature Spectroscopes with Two-Dimensional Guided-Mode Resonant Metal Grating Filters Integrated on a Photodiode Array

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