DOI: 10.32657/10356/5524
|View full text |Cite
|
Sign up to set email alerts
|

Fabrication of very high aspect micromold by SU-8 photolithography and electroforming

Abstract: I would like to take this chance to express my deep thanks and appreciation to my advisor Professor Mary Chan Bee Eng, for her great support and enormous enthusiasm in guiding me through the study of my dissertation and carefully reviewing the draft, and for her great suggestions in the progress. She supported me in every possible way to advance my academic skills. Without her continuing encouragement, this work would definitely not be as it appears today. I would also like to thank professor Miao Jianmin for … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
2
0

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 168 publications
(249 reference statements)
0
2
0
Order By: Relevance
“…Nano-sized structures can be successfully obtained when scanning algorithm is optimized [38] or TPP involving a long laser-exposure technique is applied [39]. The quantity of GBL solvent determines the viscosity and hence the range of possible resist thickness [41]. In the process of SU-8 lithography, a series of photochemical processes in the resist is initiated by selective irradiation, in which the chemical and physical properties of the exposed areas are altered.…”
Section: Laser Microfabrication and Tpa Additive Manufacturingmentioning
confidence: 99%
“…Nano-sized structures can be successfully obtained when scanning algorithm is optimized [38] or TPP involving a long laser-exposure technique is applied [39]. The quantity of GBL solvent determines the viscosity and hence the range of possible resist thickness [41]. In the process of SU-8 lithography, a series of photochemical processes in the resist is initiated by selective irradiation, in which the chemical and physical properties of the exposed areas are altered.…”
Section: Laser Microfabrication and Tpa Additive Manufacturingmentioning
confidence: 99%
“…High aspect ratio microstructures can be fabricated to emulate the thickness of 3-D tissues. In our lab, high aspect ratio (up to 15) UV embossed microstructures have been produced using non-degradable polymers111 . Schematic illustration of generations of microstructured molds or films.…”
mentioning
confidence: 99%