Fabrication of Well-Organized and Densely Packed Si Nanopillars Containing SiGe Nanodots by Using Block Copolymer Templates

Abstract

We present a method to obtain a dense array of well-organized SiGe quantum dots in Si nanopillars on a large substrate area by using a PS-b-PMMA block copolymer template. First, the 2D order of the template is evaluated using a pair correlation function and a bond-orientational correlation function. It is shown that the holes contained in the polystyrene template form a structure presenting a hexatic order. This template is then used to fabricate the nanopillars using the following method: in a first step, the copolymer template serves as a deposition mask to fabricate a hexagonal array of Pt dots. In a second step, the Pt dot pattern is transferred to an alternation of Si and SiGe layers on a silicon substrate with an anisotropically etching using Cl 2 /O 2 plasma.

Square and Rectangular Symmetry Tiles from Bulk and Thin Film 3‐Miktoarm Star Terpolymers

“…To quantify the order of the PFS (taken as representative of the c 2 mm ) and PI (representative of the p 4 mm ) microdomain arrays in the 69 nm thick film, their bond‐orientational correlation function, G 4 ( r ), ( Figure a) and their pair‐correlation function, g ( r ), (Figure 6b) were plotted following the method successfully applied to 2D arrays of diblock copolymer microdomains,32, 33 with r the interdomain spacing. The G 4 ( r ) data were well fitted with a power decay function (∼ r −η ) where the power exponent, η , of PFS and PI arrays was equal to η = 0.061 ± 0.003 and η = 0.015 ± 0.001, respectively.…”

Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

“…The nanodots could for example be integrated in a capacitor or served as a hard mask to fabricate an ordered array of nanopillars. 4 This technology was applied to form nanopillars in a multilayer made of a Si/Sio.gGeo.2 10/10 nm superlattice epitaxially grown on a Si (100) substrate by reduced pressure CVD. Here, the Pt nanodots provided a hard mask and CI2/O2 inductively coupled plasma (ICP) was used to anisotropically etch our Si/SiGe stacks.…”

“…In this context, the bottom-up approach, i.e. self-assembly of nanostructures and their direct integration in devices, seems to be a promising way to push towards miniaturization of microelectronic components and towards the creation of new functionalities.In this contribution, we will focus our attention on two emerging nanotechnologies we have developed to fabricate, organize and integrate nanomaterials (nanodots and nanowires) in nanoelectronic devices.The first approach uses the natural properties of diblock copolymers to create (i) a hexagonal lattice array of vertical PMMA cylinders in a PS matrix or (ii) an ordered array of horizontal PMMA cylinders in a PS matrix [1]. These films are then used as deposition and/or etching masks to produce dense lattices of 20 nm diameter nanoparticles and nanowires with a density of ~10 11 cm -2 .…”

“…The first approach uses the natural properties of diblock copolymers to create (i) a hexagonal lattice array of vertical PMMA cylinders in a PS matrix or (ii) an ordered array of horizontal PMMA cylinders in a PS matrix [1]. These films are then used as deposition and/or etching masks to produce dense lattices of 20 nm diameter nanoparticles and nanowires with a density of ~10 11 cm -2 .…”

Efficient photocatalytic hybrid Ag/TiO2 nanodot arrays integrated into nanopatterned block copolymer thin films

“…For instance, highly ordered 2-D NP arrays with controlled size and interparticle spacing have been suggested using amphiphilic diblock copolymers as templates. [24][25][26][27] Typical examples include the fabrication of inorganic nanopatterns derived from polystyreneb-poly(ethylene oxide) diblock copolymer (PS-b-PEO) inverse micelles, having insoluble PEO as a core and soluble PS as a corona, with inorganic precursors selectively incorporated into hydrophilic PEO domains. 28 Extending this methodology, hybrid Au/TiO 2 NP arrays were also deduced by incorporating two kinds of inorganic precursors into PS-b-PEO templates.…”