Fabrication of X-ray absorption grating by thermal composite method

Abstract

In this paper, we propose a new method to prepare X-ray absorption gratings. The thermal composite absorption gratings with periods of 80 μm and 140 μm are successfully fabricated by using the difference in X-ray absorption between aluminum and silver film. The production process and the use of equipment are simple and easy to implement. A number of absorption gratings can be produced in one production, which greatly reduces the cost of gratings. Finally, the X-ray single absorption grating imaging experiment is used to verify the effectiveness of the thermal composite absorption grating.

Process improvement of high aspect ratio nano-gratings based on synchrotron x-ray

“…In contrast, the LIGA process using synchrotron x-rays with short wavelength, high resolution, high intensity and high energy can effectively improve the efficiency of lithography and the accuracy of the exposure pattern, while enabling large-scale replication effects [13,30,31]. In recent years, x-ray related gratings have attracted a great deal of attention [6,15,32]. Shukla et al [33] designed, analyzed, and fabricated an electrostatic comb polymethyl methacrylate (PMMA) microdriver with variable aspect ratio up to 500 μm using x-ray lithography.…”

“…Shukla et al [33] designed, analyzed, and fabricated an electrostatic comb polymethyl methacrylate (PMMA) microdriver with variable aspect ratio up to 500 μm using x-ray lithography. Wu et al [32] proposed a method for fabricating absorption gratings based on thermal composite, the thermal composite absorption gratings with periods of 80 μm and 140 μm were successfully fabricated by using the difference in x-ray absorption between aluminum and silver film. In addition, x-ray lithography is also commonly used in x-ray phase contrast imaging, based on the LIGA process Wang et al [16] prepared a gold absorption grating with a period of 4 μm and a height of about 100 μm.…”