Fabrication of ZnO/HfO&lt;inf&gt;2&lt;/inf&gt;/ZnO nanowire capacitors by MOCVD

Takeuchi, Yuuri; Fujisawa, Hironori; Shimizu, Masaru; Nakashima, Seiji

doi:10.1109/iciev.2017.8338519

2017 6th International Conference on Informatics, Electronics and Vision &Amp; 2017 7th International Symposium in Computationa 2017

DOI: 10.1109/iciev.2017.8338519

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Fabrication of ZnO/HfO<inf>2</inf>/ZnO nanowire capacitors by MOCVD

Yuuri Takeuchi

Hironori Fujisawa

Masaru Shimizu

et al.

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Fabrication of ZnO/HfO<inf>2</inf>/ZnO nanowire capacitors by MOCVD

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