Fabrication process of pzt piezoelectric cantilever unimorphs using surface micromachining

Kim, Joon Han; Wang, Lei; Zürn, S.; Li, Li; Yoon, Young Soo; Polla, Dennis L.

doi:10.1080/10584589708015723

Cited by 24 publications

(6 citation statements)

References 4 publications

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“…Another possibility is to use thin film technology, which is more concerned with samples of thickness below 1 μm. Bulk or surface micromachining materials give satisfactorily results for integrated MEMS [3,4]. However, piezoelectric thin films are not well suited when large forces or deflections are required.…”

Section: Introductionmentioning

confidence: 99%

One-step firing for electroded PZT thick films applied to MEMS

Debéda

Clément

Llobet

et al. 2015

Smart Mater. Struct.

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Free-standing electroded piezoelectric thick-films are straightforwardly fabricated thanks to the association of the low-cost screen-printing technology to the sacrificial layer method. After subsequent printing and drying of a stack of sacrificial, Au, PZT and Au layers on an alumina substrate, the final firing is performed at 900 °C. Then, the partial or total releasing step of the Au/PZT/Au is achieved in a diluted acidic solution. Bridges (3.3 × 3.3 × 0.080 mm 3 ) and cantilevers (8 × 2 × 0.09 mm 3 ) are directly attached to the alumina substrate on top of which they are processed. Studies of the electromechanical behavior of these components show the influence of both the releasing and the densification processes on the piezoelectric properties of the final component. Cantilevers fabricated with this method exhibit favourable properties for sensing applications.

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Section: Introductionmentioning

confidence: 99%

One-step firing for electroded PZT thick films applied to MEMS

Debéda

Clément

Llobet

et al. 2015

Smart Mater. Struct.

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“…They are used in FeRAM, actuator of STM/AFM type, ultrasound transducer, capacitor with high dielectric constant, IR sensor, etc. High value of piezoelectric coefficient of FE PZT make them useful for micro sensor, micro actuator used micro electromechanical system (MEMS) devices [86][87][88]. Nano rods, wire and hollow tube of PZT are now used for different application [89][90][91][92][93][94][95][96][97][98].…”

Section: Lead Titanate (Pbtio 3 )mentioning

confidence: 99%

Perovskite Ferroelectric

Kour¹,

Pradhan²

2021

Multifunctional Ferroelectric Materials

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The spectrums of properties exhibited by ferroelectric materials are dielectric, ferroelectric, piezoelectric and pyroelectric effect. This is the makes these materials to have a wide range of useful application. Infrared detectors are used pyroelectric effect of ferroelectric materials. It is used in nonvolatile memories due to have ferroelectric hysteresis. Its piezoelectric properties make them useful for actuator, radio frequency filter, sensor, and transducer. Ferroelectric capacitors are used, their good dielectric behavior. According to the necessity of the system they are available in different form such as single crystals, ceramics, thin film, and polymer, composite. The diversity of properties ferroelectric materials always attracted the attention of engineers and researchers. Size reduction of this material from micro to nanoscale established an enormous consideration to develop nanotechnology. Its vast use of different filed imposed the in detail research in adding to the development of processing and characterization method. This chapter will put some light on some fundamental principle of ferroelectricity, the list of perovskite materials and their application.

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“…First, surface micromachining has been mainly employed to make simple accelerometers [12] (ZnO), [13] (PZT). One advantage of this method is that the sacrificial layer (e.g.…”

Section: Materials and Substrates For Pmemsmentioning

confidence: 99%

Microfabrication of Piezoelectric MEMS

Baborowski

2004

Integrated Ferroelectrics

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In this chapter an overview of processes for fabrication of MEMS using piezoelectric thin films as active layer in planar structures is presented. These structures are used in cantilever-like and membrane configurations for sensing and actuation. Key issues consist in findings of a compatible dry etching sequence for piezoelectric layer, electrodes and silicon. The method of compensation of the gradient of mechanical stresses in the thin films in order to obtain flat multilayer structures is demonstrated. Membrane thickness definition and liberation are obtained by DRIE of silicon on insulator (SOI) substrates or by surface micromachining. The platinum bottom electrode turned out to be a useful mask for deep silicon etching of narrow grooves. The complete process has successfully been used to fabricate flat cantilevers, ultrasonic transducers and pressure sensors. Excellent permittivity and transverse piezoelectric coefficient of PZT and AlN have been obtained with complete devices. Several examples of piezoelectric devices (ultrasonic transducers, acoustic sensor, damping control, RF switches) presented in this paper have been developed during the last years. It has been demonstrated that the microfabrication of piezoelectric MEMS based on PZT or AlN thin films is the versatile and reliable technology. Most of the developments are based on PZT sol-gel textured films, however some efforts have been done for integration of AlN for piezoelectric MEMS. In this context, the advantage of AlN is the low thermal budget processing and the possibility of post-CMOS above-IC integration. Other examples of application like ferroelectric memories, nanopatterning and local growth of PZT are presented as well.326 Electroceramic-Based MEMS: Fabrication-Technology and Applications

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Fabrication process of pzt piezoelectric cantilever unimorphs using surface micromachining

Cited by 24 publications

References 4 publications

One-step firing for electroded PZT thick films applied to MEMS

One-step firing for electroded PZT thick films applied to MEMS

Perovskite Ferroelectric

Microfabrication of Piezoelectric MEMS

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