1978
DOI: 10.1063/1.1135286
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Fabrication techniques for microdevices in soft superconductors

Abstract: Fabrication techniques for devices having dimensions of about a micrometer are presented. A versatile low-cost photolithographic microscope projection technique and chemical etching are used as part of the fabrication process. The whole procedure is proposed as an alternative to razor blade or diamond scratching techniques in laboratory research at low temperatures. A detailed description of the equipment and methods is given. Specific examples of one material devices and two material devices are described in … Show more

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Cited by 3 publications
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“…Experimental. -The samples were made by application of a projection photolithographic technique developed by us [11]. A film of 230 A of gold is evaporated on a sapphire substrate.…”
mentioning
confidence: 99%
“…Experimental. -The samples were made by application of a projection photolithographic technique developed by us [11]. A film of 230 A of gold is evaporated on a sapphire substrate.…”
mentioning
confidence: 99%