Fabrication technologies for quantum cascade photonic-crystal microlasers

Colombelli, R.; Srinivasan, Kartik; Troccoli, Mariano; Painter, Oskar; Gmachl, Claire F.; Tennant, D. M.; Sivco, Deborah L.; Cho, A. Y.; Capasso, Federico

doi:10.1088/0957-4484/15/5/046

Cited by 11 publications

(3 citation statements)

References 13 publications

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“…The conical pore shape may result from (a combination of) two processes: (1) nondirectional etching during the RIE step; (2) owing to the undercut profile of the e‐beam resist, which results from electrons backscattered from the substrate during the e‐beam dot exposure, the regions around the orifice are not fully protected from the plasma during the RIE step (the resist may even become completely ablated) and partial etching occurs 38–40…”

Section: Fabrication Of Nanopores In Sin Membranesmentioning

confidence: 99%

Cationic Scandium Allyl Complexes Bearing Mono(cyclopentadienyl) Ligands: Synthesis, Novel Structural Variety, and Olefin‐Polymerization Catalysis

Nishiura

et al. 2008

Chemistry An Asian Journal

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The one-pot salt-metathesis reaction of ScCl(3), cyclopentadienyl lithium salts, and allylmagnesium chlorides afforded with ease the corresponding base-free half-sandwich scandium di(eta(3)-allyl) complexes [(C(5)Me(4)SiMe(3))Sc(C(3)H(5))(2)] (1 a), [(C(5)Me(5))Sc(C(3)H(5))(2)] (1 b), and [(C(5)Me(5))Sc(2-MeC(3)H(4))(2)] (1 c) in high yields. Reaction of 1 a with 1 equivalent of [PhNMe(2)H][B(C(6)F(5))(4)] in toluene gave rapidly the N,N-dimethylaniline-coordinated cationic mono(eta(3)-allyl) complex [(C(5)Me(4)SiMe(3))Sc(eta(3)-C(3)H(5))(eta(6)-PhNMe(2))][B(C(6)F(5))(4)] (2). The similar reaction of 1 a with [Ph(3)C][B(C(6)F(5))(4)] yielded the analogous toluene-separated ion pair [(C(5)Me(4)SiMe(3))Sc(eta(3)-C(3)H(5))(eta(6)-PhMe)][B(C(6)F(5))(4)] (3). When [PhNMe(2)H][BPh(4)] was treated with 1 a, the contact ion pair [(C(5)Me(4)SiMe(3))Sc(eta(3)-C(3)H(5))( mu,eta(6)-Ph)BPh(3)] (4) was obtained. Recrystallization of 2, 3, and 4 in THF yielded the corresponding thf-separated ion pair complexes [(C(5)Me(4)SiMe(3))Sc(eta(3)-C(3)H(5))(thf)(2)][B(C(6)F(5))(4)] (5) and [(C(5)Me(4)SiMe(3))Sc(eta(3)-C(3)H(5))(thf)(2)][BPh(4)] (6). The N,N-dimethylaniline-coordinated cationic scandium allyl complex 2 and the toluene-coordinated analogue 3 showed high activity (activity: 3>2) toward the polymerization and copolymerization of isoprene and norbornene to afford random copolymers with a broad range of isoprene content (33-86 mol %). The tight ion pair 4 and the thf-coordinated complexes 5 and 6 showed no activity under the same conditions. These results offer unprecedented insight into the structure-activity relationship of a cationic metal polymerization-catalyst system.

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Section: Fabrication Of Nanopores In Sin Membranesmentioning

confidence: 99%

Cationic Scandium Allyl Complexes Bearing Mono(cyclopentadienyl) Ligands: Synthesis, Novel Structural Variety, and Olefin‐Polymerization Catalysis

Nishiura

et al. 2008

Chemistry An Asian Journal

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“…It is well known that the material system of choice for mid-IR QC lasers is InGaAs/AlInAs lattice matched to InP 2,3 . In addition, waveguides based on surface-plasmons 17 have been shown to be advantageous for PC QC lasers in the mid-IR 18 . This is therefore the model system that we will use for the 3D simulations.…”

Section: D-fdtd Analysis Of Mid-ir Devicesmentioning

confidence: 99%

Design of mid-IR and THz quantum cascade laser cavities with complete TM photonic bandgap

Bahriz¹,

Moreau²,

Colombelli³

et al. 2007

Opt. Express

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Abstract:We present the design of mid-infrared and THz quantum cascade laser cavities formed from planar photonic crystals with a complete in-plane photonic bandgap. The design is based on a honeycomb lattice, and achieves a full in-plane photonic gap for transverse-magnetic polarized light while preserving a connected pattern for efficient electrical injection. Candidate defects modes for lasing are identified. This lattice is then used as a model system to demonstrate a novel effect: under certain conditionsthat are typically satisfied in the THz range -a complete photonic gap can be obtained by the sole patterning of the top metal contact. This possibility greatly reduces the required fabrication complexity and avoids potential damage of the semiconductor active region. 328-332 (1993). 15. A similar phenomenon occurs in guided membrane PC structures, where it is known that the extent of the photonic gap depends on the membrane thickness. However, in the dielectric membrane structures, beyond a critical membrane thickness further reduction in thickness does not increase the bandgap due to a loss of mode localization in the dielectric membrane. The double-metal waveguide structure does not suffer from such a loss of confinement. 1957-1964 (2006

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“…The results of early studies on photonic crystals (PhCs) and their potential functionalities [1][2][3] have led to worldwide research activities for the development of a new generation of photonic devices. To that end, a large variety of three-dimensional (3D), two-dimensional (2D), and onedimensional (1D) PhC structures have been considered, and their promising applications as building blocks of novel and high performance photonic devices have been demonstrated both numerically [4][5][6][7][8][9] and experimentally [4,[10][11][12][13][14][15]. Unfortunately, the technology for precisely controlled fabrication of reproducible 3D device at the submicron-and nano-feature size has yet to be fully developed.…”

Section: Introductionmentioning

confidence: 99%

Performance changes of a grated waveguide at resonance wavelengths next to its band-edges due to modified edge sections

et al. 2010

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An efficient numerical scheme developed on the basis of Green's function method is applied to the investigation of structural effects on the performance of planar grated waveguide at the first resonance wavelengths next to the band-edges. Restricting ourselves to the transverse-electric waves, this study is focused on the effects induced by variations of the grating cell number and the depths of its four outer grooves on both sides. The different patterns of groove depth gradation or apodization considered in this study are all characterized by decreasing depth toward the ends while retaining the longitudinal grating symmetry. The effects of the modifications are expressed in terms of changes in the modal transmittance, reflectance, and out-of-plane scattering loss as well as the group velocity and resonant field enhancement. The most favorable result characterized by 15% transmittance enhancement and 85% loss reduction is achieved for the case with the most gradual changes in the groove depth. It is further shown that, for the investigated range of parameters, both the group velocity and field enhancement can best be improved by increasing the length of the uniform grating, without introducing any modification.

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Fabrication technologies for quantum cascade photonic-crystal microlasers

Cited by 11 publications

References 13 publications

Cationic Scandium Allyl Complexes Bearing Mono(cyclopentadienyl) Ligands: Synthesis, Novel Structural Variety, and Olefin‐Polymerization Catalysis

Cationic Scandium Allyl Complexes Bearing Mono(cyclopentadienyl) Ligands: Synthesis, Novel Structural Variety, and Olefin‐Polymerization Catalysis

Design of mid-IR and THz quantum cascade laser cavities with complete TM photonic bandgap

Performance changes of a grated waveguide at resonance wavelengths next to its band-edges due to modified edge sections

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