2019
DOI: 10.3390/mi10060349
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Fabrications of L-Band LiNbO3-Based SAW Resonators for Aerospace Applications

Abstract: High frequency surface acoustic wave (SAW) technology offers many opportunities for aerospace applications in passive wireless sensing and communication. This paper presents the design, simulation, fabrication, and test of an L-band SAW resonator based on 128° Y-X LiNbO3 substrate. The design parameters of SAW resonator were optimized by the finite element (FEM) method and the coupling-of-mode (COM) theory. Electron-beam lithography (EBL) technology was used to fabricate the submicron-scale of interdigital tra… Show more

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Cited by 15 publications
(6 citation statements)
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References 29 publications
(32 reference statements)
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“…Finally, it should be noted that, when having access to highly advanced and expensive manufacturing facilities, finite element method (FEM) simulations can be used to develop a physically based model for SAW design optimization [ 36 , 37 , 38 , 39 ], in order to meet the specific application requirements. On the other hand, when using commercial devices, the user has access to only the information available in the datasheets.…”
Section: Resultsmentioning
confidence: 99%
“…Finally, it should be noted that, when having access to highly advanced and expensive manufacturing facilities, finite element method (FEM) simulations can be used to develop a physically based model for SAW design optimization [ 36 , 37 , 38 , 39 ], in order to meet the specific application requirements. On the other hand, when using commercial devices, the user has access to only the information available in the datasheets.…”
Section: Resultsmentioning
confidence: 99%
“…A smart material is a material with the ability to respond to one or more stimuli, such as temperature, pH, light, solvent polarity, electricity, pressure, and/or magnetic fields in the surrounding environment and accordingly obeys a material property change to generate a sensor or an actuator . The current study focused on a simple approach towards the production of smart cobbles that can respond to light to introduce a long‐persistent luminescent smart product that is able to function as electricity‐free long‐persistence glow‐in‐the‐dark cobbles for soft indoor and outdoor lighting.…”
Section: Resultsmentioning
confidence: 99%
“…Besides the digitalization of classical industrial processes, Furniss et al [302] presented a wireless monitoring system using a SAW strain sensor to be operated under cryogenic conditions in aerospace and marine applications. Later, Hu et al [303] developed a wireless fault detection system for aerospace vehicles based on an L-band SAW resonator deposited by electron-beam lithography on a 128° Y-X LiNbO3 substrate. They reported a strain sensitivity of -831 Hz/με and a temperature sensitivity of 125.4 kHz/°C in a range of 25 -250 °C.…”
Section: ) Temperature Sensorsmentioning
confidence: 99%