Fabrications of Micro Tools and Micro Patterns by Electrochemical Micromachining and Some Investigation Into Overpotential

Jain, V.K.; Chauhan, Arpita Singh; Thakur, Anurag; Sidpara, Ajay

doi:10.1142/s0219686713500054

Cited by 8 publications

(3 citation statements)

References 13 publications

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“…micro-grooves, or it uses a universal electrode tool, where the path of the tool gives the 3D space. Typically, these tools are produced by micromechanical-, laser ablation-, etching-or different-erosion techniques [14,15]. In [16] a copper sheet is used as a kind of "universal tool" to make lines and pillars on plane and convex substrates.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of micro-structured tools for the production of curved metal surfaces by pulsed electrochemical machining

Mankeekar

Bähre

Durneata

et al. 2021

Int J Adv Manuf Technol

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A new, scalable process chain for the fabrication of curved micro-structured metallic tools is developed and evaluated. Arrays of arrows, circles, semicircles and rings with final lateral dimensions of 124 to 819 µm are realised on the tools and successfully transmitted in one process step to stainless steel workpieces with a functional area of 6.5 cm2 using pulsed electrochemical machining. Photolithography-etching or micromilling are applied as initial micro-structuring processes, resulting in micro-structured master forms. These forms are copied into reusable silicon forms. This is followed by epoxy casting and electroforming to obtain the final tools. The tools are made of Nickel and have a diameter of 34 mm. Whilst micromilling, photolithography, silicon casting, epoxy casting and electroforming copy the structures very precisely, the wet etching process induces a widening of the dimensions due to the isotropic character of the process. The advantage of the process chain is the reusability of the master as well as of the silicone forms, which can be copied very precisely and easily with scalable processes to get precision tools with relatively large micro-structured areas. The reusability of the forms makes the fabrication of micro-structured tools relatively cost-efficient. The use of photolithography as the initial structuring process enables the generation of arbitrary, user-defined geometries for the micro-structures on the tool surface. The process chain described has the potential to fabricate lateral structure sizes on tools down to one micrometre.

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Section: Introductionmentioning

confidence: 99%

Fabrication of micro-structured tools for the production of curved metal surfaces by pulsed electrochemical machining

Mankeekar

Bähre

Durneata

et al. 2021

Int J Adv Manuf Technol

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“…Electrochemical micromanufacturing is a key micromanufacturing technology that has been used to manufacture microstructures with the advantages of no heat affected zones, no cutting force, and no tool wear. 1 Photolithography, which is employed to produce micro patterns on photoresist-coated workpiece, is a common step in the electrochemical micromanufacturing process. A new fabrication process for polydimethylsiloxane (PDMS) micro through-holes mask for generating a microstructure array has been demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Simulation and analysis of through-mask electrochemical machining with moving tools

Liu

Chen

Lee

2021

Advances in Mechanical Engineering

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At present, the development of through-mask micro-electrochemical machining is only limited to static machining, where the size of the tool is usually the same as that of the workpiece. However, in the electrochemical processing, metal with good electrical conductivity is chosen as the tool electrode, and it is usually very expensive. Based on the cost consideration, a moving tool with small size may be preferred. Finite element method is used in this paper to create the electric field model of through-mask micro-electrochemical machining with moving tool. The effects of the parameters, such as applied voltage, mask thickness, on the machining shape are investigated. The results show that the higher the applied voltage, the larger the machining depth and width, and also the better the aspect ratio. When the thickness of the mask is thin, the electric field is unevenly distributed and the lateral corrosion is more serious. There is an island-like phenomenon, which is related to the masking of the mask. When the moving speed is relatively slow, the relative processing time is longer. The current density accumulated on the surface of the workpiece is thus higher and the material removal rate is higher. As the processing time increases, the machining depth becomes deeper, and the forward corrosion rate is slow down.

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“…Electrochemical micromanufacturing is a key micromanufacturing technology that has been used to manufacture microstructures with the advantages of no heat affected zones, no cutting force, and no tool wear [5,6]. Photolithography, which is employed to produce micropatterns on photoresist-coated workpiece, is a common step in the electrochemical micromanufacturing process [7,8].…”

Section: Introductionmentioning

confidence: 99%

The Fabrication and Application of a PDMS Micro Through-Holes Mask in Electrochemical Micromanufacturing

Chen

et al. 2014

Advances in Mechanical Engineering

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The electrochemical micromanufacturing process, as a key micromanufacturing technology, plays an important role in diverse industries. In this paper, polydimethylsiloxane (PDMS) is employed as a mask in the electrochemical micromanufacture of microstructures because of its chemical resistance, low cost, flexibility, and high molding capability. A new method for fabricating a PDMS micro through-holes mask is proposed. In this method, a thin resist film is employed to enhance the adhesion between the substrate and the SU-8 pillar array which is used as a mold. A vacuum-aided process is used to inject the PDMS gel into the SU-8 mold and the PDMS micro through-holes mask can be peeled off from the SU-8 mold when the gel is cured. Experiments were conducted to verify the feasibility of the proposed approach and PDMS microholes of various shapes were obtained. The PDMS mask can then be successfully applied in the electrochemical micromanufacturing process to generate microstructures and microdimple and embossment arrays have been successfully demonstrated. Furthermore, the PDMS mask can be reused, as it is not damaged during the manufacturing process.

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Fabrications of Micro Tools and Micro Patterns by Electrochemical Micromachining and Some Investigation Into Overpotential

Cited by 8 publications

References 13 publications

Fabrication of micro-structured tools for the production of curved metal surfaces by pulsed electrochemical machining

Fabrication of micro-structured tools for the production of curved metal surfaces by pulsed electrochemical machining

Simulation and analysis of through-mask electrochemical machining with moving tools

The Fabrication and Application of a PDMS Micro Through-Holes Mask in Electrochemical Micromanufacturing

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