Facet formation in silicon single crystals grown by VMFZ method

Kimura, M.; Arai, Hisako; Mori, Takahiro; Yamagishi, Hiroshi

doi:10.1016/0022-0248(93)90334-s

Cited by 10 publications

(1 citation statement)

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“…The most important implication of using static magnetic fields is that sufficient damping will result in a reduction or even complete suppression of the time-dependent behavior of flows and thus weaken or eliminate dopant striations. In the field of Si-FZ growth, only few experiments have investigated the effect of axial or transverse static fields, [7][8][9][10][11][12] with inductions up to 500 mT. All of them used rf heating, where the rf induced flow is probably dominating.…”

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confidence: 99%

The Influence of Static and Rotating Magnetic Fields on Heat and Mass Transfer in Silicon Floating Zones

Cröll

Dold

Kaiser

et al. 1999

J. Electrochem. Soc.

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Heat and mass transfer in float‐zone processing are strongly influenced by convective flows in the zone. They are caused by buoyancy convection, thermocapillary (Marangoni) convection, or artificial sources such as rotation and radio‐frequency heating. Flows in conducting melts can be controlled by the use of magnetic fields, either by damping fluid motion with static fields or by generating a defined flow with rotating fields. The possibilities of using static and rotating magnetic fields in silicon floating‐zone growth have been investigated by experiments in axial static fields up to 5 T and in transverse rotating magnetic fields up to 7.5 mT. Static fields of a few 100 mT already suppress most striations but are detrimental to the radial segregation by introducing a coring effect. A complete suppression of dopant striations caused by time‐dependent thermocapillary convection and a reduction of the coring to insignificant values, combined with a shift of the axial segregation profile toward a more diffusion‐limited case, is possible with static fields ≥1 T. However, under certain conditions the use of high axial magnetic fields can lead to the appearance of a new type of pronounced dopant striations, caused by thermoelectromagnetic convection. The use of a transverse rotating magnetic field influences the microscopic segregation at quite low inductions, of the order of a few millitesla. The field shifts time‐dependent flows and the resulting striation patterns from a broad range of low frequencies at high amplitudes to a few high frequencies at low amplitudes. © 1999 The Electrochemical Society. All rights reserved.

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