2016
DOI: 10.1063/1.4961126
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Facile preparation of porous alumina through-hole masks for sputtering by two-layer anodization

Abstract: Highly ordered porous alumina through-hole masks were fabricated on a substrate by combining two-layer anodization with subsequent through-holing by selective etching. This process allowed the fabrication of porous alumina masks without an increase in pore size during the etching performed for through-holing. Additionally, the process contributed to improved operability in the setting of the masks on substrates because the second anodizing layer acts as a supporting layer for the handling of the mask. The fabr… Show more

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Cited by 7 publications
(5 citation statements)
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“…It is known that AAO produced in a highly concentrated sulfuric acid electrolyte has a low chemical stability [35] and undergoes structural alterations when heated in water-based solutions [36]. So we decided to test the stability of our samples.…”
Section: Resultsmentioning
confidence: 99%
“…It is known that AAO produced in a highly concentrated sulfuric acid electrolyte has a low chemical stability [35] and undergoes structural alterations when heated in water-based solutions [36]. So we decided to test the stability of our samples.…”
Section: Resultsmentioning
confidence: 99%
“…1 . A through-hole porous alumina mask with an ordered array of openings was prepared by two-step anodization followed by two-layer anodization [ 17 ]. The first anodization was carried out on electrochemically polished aluminum (99.99% purity) at a constant voltage of 40 V in 0.3 mol dm −3 oxalic acid at 30 °C for 3 h. The anodization voltage of 40 V is well-established as a self-ordering condition that produces a highly ordered pore arrangement in anodic alumina [ 18 ].…”
Section: Methodsmentioning
confidence: 99%
“…In the third technique, the AAO/Al was anodised for a third time in 12 M H 2 SO 4 at a constant voltage similar to the formation voltage, i.e., either 40 V or 25 V, at 0 • C for 20 min (for every 90 min of the second anodisation step). The detachment of the membrane was carried out in the mixed solution of CrO 3 and H 3 PO 4 at 30 • C for 15 min (for every 90 min of the second anodisation step) [27][28][29].…”
Section: The Wet Etching Of Two-layered Anodic Porous Aluminamentioning
confidence: 99%