“…During the past few decades, extensive efforts have been devoted to synthesizing high-quality Si 3 N 4 , and plenty of advanced synthesis technologies have been developed, including direct nitridation, 3 carbothermal reduction, 10 polymer precursor pyrolysis 11,12 and chemical vapor deposition. 13 Recently, single-crystalline Si 3 N 4 nanospheres with a smooth surface have been synthesized using a radio frequency thermal plasma system. 6 The Si 3 N 4 nanosphere exhibits high thermal conductivity, excellent thermal stability and low dielectric loss tangent.…”