1959
DOI: 10.1080/00207215908937191
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Factors Affecting Contrast and Resolution in the Scanning Electron Microscope†

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1965
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Cited by 120 publications
(34 citation statements)
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“…In addition, changing the specimen bias alters the potential distribution on the surface of the specimen which modifies the SE trajectories and thus the SE intensity-a phenomenon referred to as voltage contrast. Everhart and Oatley first observed voltage contrast in the late 1950s [1,2]. They noticed that the SE image became brighter when a negative voltage was applied to the specimen and darker when a positive voltage was applied.…”
Section: Introductionmentioning
confidence: 95%
“…In addition, changing the specimen bias alters the potential distribution on the surface of the specimen which modifies the SE trajectories and thus the SE intensity-a phenomenon referred to as voltage contrast. Everhart and Oatley first observed voltage contrast in the late 1950s [1,2]. They noticed that the SE image became brighter when a negative voltage was applied to the specimen and darker when a positive voltage was applied.…”
Section: Introductionmentioning
confidence: 95%
“…Voltage contrast measurements [49] in the scanning electron microscope (SEM) provide one of the most convenient ways of visually observing the operation of integrated circuits. By measuring the energies of the secondary electrons emitted from the device during irradiation in the SEM, it is possible to monitor very accurately [50] the voltage at different points in the circuit.…”
Section: Sem Voltage Measurementsmentioning
confidence: 99%
“…The collection of the secondary electrons (SE) in the scanning electron microscope (SEM) has been discussed in detail by Everhart et al (1959), Peters (1982), and Reimer (1993). At first glance, the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be expected to attract all SE of a kinetic energy <50 eV or at least those falling near the maximum of the SE spectrum at only a few eV.…”
Section: Introductionmentioning
confidence: 99%