2022
DOI: 10.3390/ma15072483
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Failure Analysis of a C-276 Alloy Pipe in a Controlled Decomposition Reactor

Abstract: Failure analysis was carried out on a ruptured C-276 pipe heated externally at 1050 °C, which had been used for a few months in a controlled decomposition reactor (CDR) system. To catch the decomposed perfluorinated compounds (PFCs, e.g., CF4, SF6, NF3, C3F8 and C4F8) present in the exhaust gas, the C-276 reactor was periodically purged with water mist, which caused a temperature gradient from the external to the inner surface of the pipe. The precipitation of large amounts of intermetallic compounds along the… Show more

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“…As another class of flexible substrates, metal foils exhibit good mechanical performance and high thermal stability and do not react with moisture and oxygen; thus, they have been used in flexible reflective display panels and amorphous silicon solar cells [72,79,80]. For instance, stainless steel can withstand high temperatures (up to 1300 • C) and is thermally much more stable than polymers and glass [81]. Because of this property, it can be used as a substrate for the growth of ceramic semiconductor thin films [82,83].…”
Section: Flexible Substratesmentioning
confidence: 99%
“…As another class of flexible substrates, metal foils exhibit good mechanical performance and high thermal stability and do not react with moisture and oxygen; thus, they have been used in flexible reflective display panels and amorphous silicon solar cells [72,79,80]. For instance, stainless steel can withstand high temperatures (up to 1300 • C) and is thermally much more stable than polymers and glass [81]. Because of this property, it can be used as a substrate for the growth of ceramic semiconductor thin films [82,83].…”
Section: Flexible Substratesmentioning
confidence: 99%