Failure analysis of integrated devices by scanning thermal microscopy (SThM)

Fiege, G.B.M.; Feige, Volker K. S.; Phang, J.C.H.; Maywald, M.; Görlich, S.; Balk, L.J.

doi:10.1016/s0026-2714(98)00086-9

Cited by 51 publications

(19 citation statements)

References 4 publications

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“…By using a resistive thermal probe the detection of the temperature distribution with an accuracy of 5 mK in the temperature range and a local resolution of about 50 nm was demonstrated [6]. In addition, using the resistive probe as heater and detector simultaneously, contrast imaging of different local thermal properties and measurements of the quantitative thermal conductivity with an error of ±2% are achievable [7].…”

Section: Experimental Set-up and Operation Modesmentioning

confidence: 99%

Scanning near field thermal microscopy on a micromachined thin membrane

Altes

Mutamba

Heiderhoff

et al. 2004

Superlattices and Microstructures

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Section: Experimental Set-up and Operation Modesmentioning

confidence: 99%

Scanning near field thermal microscopy on a micromachined thin membrane

Altes

Mutamba

Heiderhoff

et al. 2004

Superlattices and Microstructures

Self Cite

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“…29 -31 Useful SThM for the semiconductor industry combines SFM (see section 2.1) with a highly sensitive thermal detector at the end of the cantilever. 32,33 Detectors based on thermocouples, Schottky diodes and resistors have been developed. Figure 6(a -c) shows an schematic set-up of an SThM which is based on the measurement of a resistor consisting of a Wollaston wire with a platinum core.…”

Section: Scanning Thermal Microscopy Of Hot Spotsmentioning

confidence: 99%

Scanning Probe Microscopy, Industrial Applications of

Born

2000

Encyclopedia of Analytical Chemistry

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Scanning probe microscopy (SPM) has developed to become an integral part of the hierarchy of analytical tools in industrial surroundings, owing to its excellent spatial resolution and its ability to work under ambient conditions. The purpose of this article is to give an insight into the potential of SPM techniques in industrial applications today. Owing to the wide variety of possible applications, this article can present only a small selection of uses. The given examples highlight typical aspects of the current analytical work of different industrial laboratories. First, an introduction to the specific industry and its analytical obstacles is given. Second, a solution using a SPM method is demonstrated and the particular SPM method is explained in detail. Finally, an actual measurement is given for each example. To summarize, with the necessary precautions concerning stable conditions during the measurement, SPMs are a useful tool for industrial applications which fulfill the demands of industry today. SPMs are commercially available, rapid, quantitative and reproducible. Furthermore, they are available with a user‐friendly interface. The increasing number of companies that are using SPMs in the laboratory and manufacturing every day provides evidence of the rising popularity of SPM.

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“…Application of the SThM for an analysis of the failure due to the electromigration has been reported in 1990s as well [4][5]7]. However, such SThM have to be contact or extremely close to the specimen, and impede the device operation thermally and electrically.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

Suita

Hara

Ishikawa

et al. 2013

JAMDSM

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This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O 3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

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Failure analysis of integrated devices by scanning thermal microscopy (SThM)

Cited by 51 publications

References 4 publications

Scanning near field thermal microscopy on a micromachined thin membrane

Scanning near field thermal microscopy on a micromachined thin membrane

Scanning Probe Microscopy, Industrial Applications of

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

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