A challenge for design, testing and fabrication of nano-structured chemical sensors is the fabrication of mm 2 size arrays of nano-structures in a reasonable time. Herein, we introduce and show how direct laser writing (DLW) in positive-tone photo-resists, followed by lift-off process can be used for fast fabrication (up to three-times faster than comparable Electron Beam lithography system) of arrays of nano-scale plasmonic structures with a great level of control over the design and dimensions of the nano-structures. We demonstrate the function of nano-structured arrays, fabricated by various DLW approaches, with surface enhanced infra-red absorption (SEIRA) detection of nine vibrational modes of PMMA. We also discuss the tunability of the plasmonic resonance -and hence the spectral detection range -by alteration of the size and array parameters of the nanostructures, and demonstrate the flexibility of this fabrication method by showing devices made of various substrate and antennas materials.
KeywordsChemical detection, SEIRA , Plasmonic sensors, Direct laser writing, Nano-fabrication When adsorbed near or on nano-structured metal surfaces, molecules can demonstrate a remarkable change in their optical properties with applications in surface enhanced spectroscopies. Two notable examples for such detection methods are surface enhanced Raman scattering (SERS) 1-4 , and surface enhanced infrared absorption (SEIRA) [4][5][6][7][8][9][10][11][12][13][14][15][16] . In SEIRA spectroscopy, metallic and dielectric nanoantennas that exhibit plasmonic resonances in the Infra-Red (IR) regime are used to intensify the IR absorption signal of known vibrational modes of molecules, so that even small amount of analytes can be identified [4][5][6][7][8][9][10][11][12][13][14][15][16] . The improved detection originates from the excitation of localized surface plasmon resonances (LSPRs) -charge oscillations on the surface of the nano-structured surface -which give rise to a strong local electric field at the vicinity of the nanostructures and enhanced coupling between the textured surface and the vibrational modes of the adsorbed molecules. The enhancement is strongest when the plasmonic resonance of the nano-structures matches the spectral position of the vibrational fingerprints. This implies that that the spectral range at which improved detection is possible and the enhancement factor of the chemical sensor depend on sensor materials 12,15,16 (both of the nanostructures and the substrate), and the shape 13,14,[17][18][19] and dimensions of individual structures 8,12,16,18 and the spacing between them 10 .