devices, their relatively low Q-factors (typically below 20 of single-ring resonator MMs) [ 11,13 ] compared to micro-and nanoscale mechanical resonators (typically between 10 4 and 10 7 ) [ 14 ] impose a limitation on their sensitivities.One of the approaches to increase the Q-factor of MMs is to reduce the energy losses of MMs and substrates by optimizing the material properties and structures of the MMs. [ 15 ] There are typically three main energy loss mechanisms: Ohmic loss of MMs, [ 16 ] dielectric loss of the substrate, [ 17 ] and radiation loss of MMs. [ 18 ] The most common method to increase Q-factor of MMs without changing material properties is to design asymmetric split resonators (ASRs) by breaking the symmetry of the MMs. [ 19,20 ] The asymmetric design reduces the radiation loss of the resonator and increases Q-factor up to 30. [21][22][23][24] Another method uses coupling between MMs in a super unit to excite both odd and even modes of the MMs. This approach improves Q-factor by a factor of 5 compared to typical fi lm-based MMs. [ 25 ] The Q-factor of THz MMs needs to be further enhanced (10-20 times) to meet the requirement of ultrasensitive sensors with high selectivity. In the present study, we introduce novel nanopillar-based THz split ring resonator (SRR) MMs, utilizing displacement current in the dielectric medium between nanopillars that signifi cantly increases energy storage in the MMs, leading to enhanced Q-factor up to about 450 (about 30 times higher than that of typical thin-fi lm-based MMs). A metallic nanopillar array is designed in the form of a single gap (C-shape) SRR. Vacuum or dielectric materials of different permittivities are fi lled between the nanopillars to form nanoscale dielectric gaps. The size of the dielectric gaps varies from a few nanometers up to tens of nanometers. Since the use of nanopillars offers large surface area, the total electric charge separation (+ q and − q ) on the collective surfaces increases, resulting in the increase in electrostatic energy stored in the MMs, which leads to signifi cantly enhanced Q-factor. In addition, dielectric nanogaps reduce the Ohmic loss generated by the current circulating in the metal conductor, thus the total energy loss of MMs is reduced, which further enhances the Q-factor of the MMs. Hence, high Q-factor up to about 450 can be observed in the nanopillar-based SRR MMs, which means that they are much more sensitive than typical thin-fi lm-based MMs.Terahertz metamaterials (THz MMs) have been proven to be good candidates for chemical, biological, temperature, strain, and position sensing. However, currently developed thin-metal-fi lm-based split ring resonator (SRR) MMs have relatively low quality factor (Q-factors), leading to a poor sensitivity, which is one of the obstacles for development of sensors. In order to enhance the Q-factor, novel THz MMs, nanopillar-based MMs, are designed, fabricated, and characterized. The nanopillar-based MMs excite the inductivecapacitive resonance via desplacement currents, showing a...