2015
DOI: 10.1117/12.2076219
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Far infrared microbolometers for radiometric measurements of ice cloud

Abstract: Focal planes of 80x60 VO x microbolometers with pixel pitch of 104 µm were developed in support of the remote sensing of ice clouds in the spectral range from 7.9 to 50 µm. A new design that relies on the use of central posts to support the microbolometer platform was shown effective in minimizing the structural deformation usually occurred in platforms of large area. A process for goldblack coating and patterning of the focal plane arrays was established. It was found that the goldblack absorbs more than 98 %… Show more

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Cited by 4 publications
(5 citation statements)
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“…As a result, the NER ranges from approximately 0.01 to 0.02 W m −2 sr −1 depending on spectral band and number of pixels used. To illustrate the resolution of the FIRR in terms of brightness temperature, the NER is converted into noise equivalent temperature difference (NETD, e.g., Niklaus et al, 2008), that is the temperature increase a perfect BB should experience for its radiance change to equal the NER. Figure 6 shows the variations of NETD with BB temperature for a NER of 0.01 W m −2 sr −1 .…”
Section: Instrument Resolutionmentioning
confidence: 99%
“…As a result, the NER ranges from approximately 0.01 to 0.02 W m −2 sr −1 depending on spectral band and number of pixels used. To illustrate the resolution of the FIRR in terms of brightness temperature, the NER is converted into noise equivalent temperature difference (NETD, e.g., Niklaus et al, 2008), that is the temperature increase a perfect BB should experience for its radiance change to equal the NER. Figure 6 shows the variations of NETD with BB temperature for a NER of 0.01 W m −2 sr −1 .…”
Section: Instrument Resolutionmentioning
confidence: 99%
“…The reference configuration of the instrument is 10 bands, and the NER is assumed the same for each channel, equal to 0.01 W m −2 sr −1 . This is consistent with a thermal sensor coated with gold black which has spectrally flat absorbance through the whole IR range [e.g., Ngo Phong et al , ], and with the absence of significant spectral differences in the transmittance along the optical path. Such characteristics are expected for a grating‐based or filter wheel‐based radiometer.…”
Section: Motivation and Methodsmentioning
confidence: 99%
“…The development of FIR spectrometers has been hindered for several reasons: (1) radiometric responsivity of existing sensors is much less in the FIR than in the MIR; (2) observations from the ground are in most locations useless since the atmosphere is essentially opaque in the FIR; (3) hyperspectral instruments in the MIR, such as AIRS or Infrared Atmospheric Sounding Interferometer (IASI) [ Blumstein et al , ], already contain much information about the atmosphere. There has been in the last decade a renewed interest for satellite missions in the FIR, though, mainly fostered by the availability of new technologies based on uncooled thermal sensors such as thermopiles [ McCleese et al , ], pyroelectrics [ Palchetti et al , ], and microbolometers [ Ngo Phong et al , ]. Such sensors, when coated with gold black, have sufficient sensitivities and are easier to deploy in space than cooled systems.…”
Section: Introductionmentioning
confidence: 99%
“…In this sense it is very similar to the Mars Climate Sounder (McCleese et al, 2007) and the Diviner Lunar Radiometer Experiment (Paige et al, 2010), which use uncooled thermal sensors to probe radiation in the FIR. The FIRR sensor is a 2-D array of uncooled microbolometers coated with gold black (Ngo Phong et al, 2015), and radiometric calibration is achieved with two reference blackbodies (BB) at distinct temperatures. The latter consist of cavities whose temperature and emissivity are well known, so that the radiance they emit is accurately estimated.…”
Section: The Far-infrared Radiometermentioning
confidence: 99%