1993
DOI: 10.1016/0040-6090(93)90276-u
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Far-IR spectroscopic ellipsometer

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Cited by 28 publications
(8 citation statements)
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“…The measurements were partly performed with a homebuilt ellipsometer attached to a Bruker 113v Fourier transform IR spectrometer 11 and with the same ellipsometer attached to a Nicolet Impact 400 vacuum Fourier spectrometer at the beam line U4IR of the National Synchrotron Light Source ͑NSLS͒ in Brookhaven. 12 The ellipsometer is basically a rotating analyzer setup, where the polarization ellipse of the light after reflection on the sample is determined by monitoring for each frequency the detected intensity as a function of the analyzer angle A.…”
Section: Experimental Details Sample Preparation and Data Evalumentioning
confidence: 99%
“…The measurements were partly performed with a homebuilt ellipsometer attached to a Bruker 113v Fourier transform IR spectrometer 11 and with the same ellipsometer attached to a Nicolet Impact 400 vacuum Fourier spectrometer at the beam line U4IR of the National Synchrotron Light Source ͑NSLS͒ in Brookhaven. 12 The ellipsometer is basically a rotating analyzer setup, where the polarization ellipse of the light after reflection on the sample is determined by monitoring for each frequency the detected intensity as a function of the analyzer angle A.…”
Section: Experimental Details Sample Preparation and Data Evalumentioning
confidence: 99%
“…[37] to use this method of sequential stepping a continuous wave source or using a continuous, but broad band source and taking advantage of the frequency multiplexing afforded by Fourier Transform Infrared (FTIR) spectroscopy. Following work in the mid-infrared by Rösler et al [33] and others [34,35], Barth et al [39] constructed an FIR spectroscopic ellipsometer based on a commercial Bruker 113v FTIR instrument. The spectral range covered was 0.9 -18 THz.…”
Section: Far Infrared Ellipsometry Using Continuous Wave Sourcesmentioning
confidence: 99%
“…The depleted layer results from the charge trapped at the surface; it is strongly influenced by oxidation and adsorption. 6 The measured quantity is the ratio of complex amplitude reflectivities r p and r s of the p-and s-polarized light, respectively, 3 The technique is intrinsically sensitive to the presence of thin films.…”
mentioning
confidence: 99%