The data presented in this article relate to the scientific article “Pyrolysis of a mixture of monosilane and alkanes in a compression reactor to produce nanodispersed silicon carbide” [1]. In the above article, a method is proposed for producing nanosized silicon carbide powder by compression in a cyclic process of a chemical reactor. Pyrolysis is initiated in mixtures of monosilane and hydrocarbon with argon. The article also presents the analysis data of the obtained product by X-ray diffraction and electron microscopy.