Fast demodulated white-light interferometry-based fiber-optic Fabry–Perot cantilever microphone

Chen, Ke; Yu, Zhihao; Yu, Qingxu; Guo, Min; Zhao, Zhihao; Qu, Chen; Gong, Zhenfeng; Yang, Yang

doi:10.1364/ol.43.003417

Cited by 126 publications

(49 citation statements)

References 22 publications

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“…Figure 1(a) shows the structure diagram of the sensor head. The cleaved endface of the fiber and the free-vibration cantilever together form an EFPI [29,30,32,33]. The stainless steel shell is used to fix the ceramic ferrule and the cantilever diaphragm.…”

Section: Manufacturing Methods Of the Cantilever Microphonementioning

confidence: 99%

Trace Ammonia Detection Based on Near-Infrared Fiber-Optic Cantilever-Enhanced Photoacoustic Spectroscopy

et al. 2019

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A trace ammonia (NH 3) detection system based on the near-infrared fiber-optic cantilever-enhanced photoacoustic spectroscopy (CEPAS) is proposed. A fiber-optic extrinsic Fabry-Perot interferometer (EFPI) based cantilever microphone has been designed to detect the photoacoustic pressure signal. The microphone has many advantages, such as small size and high sensitivity. A near-infrared tunable erbium-doped fiber laser (EDFL) amplified by an erbium-doped fiber amplifier (EDFA) is used as a photoacoustic excitation light source. To improve the sensitivity, the photoacoustic signal is enhanced by a photoacoustic cell with a resonant frequency of 1624 Hz. When the wavelength modulation spectroscopy (WMS) technique is applied, the weak photoacoustic signal is detected by the second-harmonic detection technique. Trace NH 3 measurement experiments demonstrate that the designed fiber-optic CEPAS system has a linear response to concentrations in the range of 0 ppm-20 ppm at the wavelength of 1522.448 nm. Moreover, the detection limit is estimated to be 3.2 ppb for a lock-in integration time of 30 s.

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Section: Manufacturing Methods Of the Cantilever Microphonementioning

confidence: 99%

Trace Ammonia Detection Based on Near-Infrared Fiber-Optic Cantilever-Enhanced Photoacoustic Spectroscopy

et al. 2019

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“…Optical MEMS microphone gained increasing attention due to its extra high sensitivity, broadband frequency response, high signal-to-noise ratio, and immunity to electromagnetic interference. Figure 4e depicted a MEMS cantilever based optical microphone designs with high resolution and wide dynamic range [73]. The Fabry-Parot cavity formed between fiber tip and cantilever will change its length under acoustic waves and be measured by fast demodulated white-light interferometry, then it will be converted into electrical signals.…”

Section: Mems Acoustic Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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“…The modulated laser light is injected into the microcavity through the single-mode fiber to excite the PA pressure wave, which is detected by the MEMS microphone (ICS-40730, Invensense) with a sound sensitivity of 25 mV/Pa and a relatively flat frequency response from 25 Hz to 25 kHz. Due to the characteristics of almost background-free absorption, photoacoustic (PA) spectroscopy (PAS) is one of the most sensitive trace gas detection methods [11][12][13][14][15][16]. A particular advantage is that the detection sensitivity is generally inversely proportional to the volume of the PA cell, which can effectively reduce the volume of the absorption cell [17,18].…”

Section: Design Of the Pa Microcavity Sensormentioning

confidence: 99%

Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection

Chen

Zhang

et al. 2020

Sensors

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A highly sensitive photoacoustic (PA) microcavity gas sensor for leak detection is proposed. The miniature and low-cost gas sensor mainly consisted of a micro-electro-mechanical system (MEMS) microphone and a stainless-steel capillary with two small holes opened on the side wall. Different from traditional PA sensors, the designed low-power sensor had no gas valves and pumps. Gas could diffuse into the stainless-steel PA microcavity from two holes. The volume of the cavity in the sensor was only 7.9 μL. We use a 1650.96 nm distributed feedback (DFB) laser and the second-harmonic wavelength modulation spectroscopy (2f-WMS) method to measure PA signals. The measurement result of diffused methane (CH4) gas shows a response time of 5.8 s and a recovery time of 5.2 s. The detection limit was achieved at 1.7 ppm with a 1-s lock-in integral time. In addition, the calculated normalized noise equivalent absorption (NNEA) coefficient was 1.2 × 10−8 W·cm−1·Hz−1/2. The designed PA microcavity sensor can be used for the early warning of gas leakage.

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Fast demodulated white-light interferometry-based fiber-optic Fabry–Perot cantilever microphone

Cited by 126 publications

References 22 publications

Trace Ammonia Detection Based on Near-Infrared Fiber-Optic Cantilever-Enhanced Photoacoustic Spectroscopy

Trace Ammonia Detection Based on Near-Infrared Fiber-Optic Cantilever-Enhanced Photoacoustic Spectroscopy

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Highly Sensitive Photoacoustic Microcavity Gas Sensor for Leak Detection

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