2017
DOI: 10.1007/s00339-017-1161-5
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Fast deposition of thick diamond-like carbon films by ion-beam technique

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Cited by 7 publications
(1 citation statement)
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“…Instead, we resort to the other route, namely surficial modification specifically based on ion beam implantation and deposition techniques. [15][16][17][18][19][20][21] To be more precise, the metal vapor vacuum arc (MEVVA) and filtered cathodic vacuum arc (FCVA) [16] are employed to develop the glue-free electronic substrates that can endure liquidnitrogen temperatures. The FCVA technique, in comparison to magnet-controlled sputtering, yields ions with higher energies which in turn can effectively promote the ion deposition onto the substrate surface.…”
Section: Introductionmentioning
confidence: 99%
“…Instead, we resort to the other route, namely surficial modification specifically based on ion beam implantation and deposition techniques. [15][16][17][18][19][20][21] To be more precise, the metal vapor vacuum arc (MEVVA) and filtered cathodic vacuum arc (FCVA) [16] are employed to develop the glue-free electronic substrates that can endure liquidnitrogen temperatures. The FCVA technique, in comparison to magnet-controlled sputtering, yields ions with higher energies which in turn can effectively promote the ion deposition onto the substrate surface.…”
Section: Introductionmentioning
confidence: 99%