2023
DOI: 10.31857/s0544126923700345
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Fast Electrochemical Micropump for Portable Drug Delivery Module

I. V. Uvarov,
P. S. Shlepakov,
A. M. Abramychev
et al.

Abstract: Microfluidic devices are capable of precise drug delivery to the human body. For this purpose, they must be equipped with a compact pump that provides a high flow rate and precise dosing. In this paper, we present a micropump based on a fast electrochemical actuator that meets these requirements. It contains three actuators operating in the peristaltic mode. The device is fabricated from glass and silicon wafers using the standard microfabrication processes. The working part of the pump has a size of about 3 m… Show more

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