Glass is an ideal material for optical applications, even though only a few
micromachining technologies for material ablation are available. These
microstructuring methods are limited regarding precision and freedom
of design. A micromachining process for glass is laser induced deep
etching (LIDE). Without generating micro-cracks, introducing stress,
or other damages, it can precisely machine many types of glass. This
work uses LIDE to subtractive manufacture structures in glass carrier
substrates. Due to its transmission characteristics and refractive
index, the glass substrate serves as optical cladding for polymer
waveguides. In this paper, the described fabrication process can be
divided into two sub-steps. The doctor blade technique and subsequent
additive process step is used in manufacturing cavities with U-shaped
cross-sections in glass in order to fill the trenches with liquid
optical polymers, which are globally UV-cured. Based on the higher
refractive index of the polymer, it enables optical waveguiding in the
visible to near-infrared wavelength range. This novel, to the best of
our knoowledge, manufacturing method is called LDB
(LIDE-doctor-blade); it can be the missing link between long-distance
transmissions and on-chip solutions on the packaging level. For
validation, optical waveguides are examined regarding their
geometrical dimensions, surface roughness, and waveguiding ability,
such as intensity distribution and length-dependent attenuation.