Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Summitt, Chris; Wang, Sunglin; Namnabat, Soha; Johnson, Lee; Milster, Tom D.; Takashima, Yuzuru

doi:10.1364/oe.25.017960

Cited by 2 publications

(1 citation statement)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Compared with the previous method using 45-degree mirrors [45,46], the fan-out configurations using one slab of metasurfaces have apparent advantages: (1) the proposed devices have much more compact footprints;…”

Section: Vertical Out-coupler For Multilayer Waveguidesmentioning

confidence: 99%

Light manipulation in three-dimensional photonic integrated circuits using vertically inserted metasurfaces

Wu¹,

Zhang²

2021

Phys. Scr.

View full text Add to dashboard Cite

The hybrid integration of silicon metasurfaces, in forms of insertable thin-film elements, into a multilayer polymer waveguide platform is introduced. Owing to the wavelength comparable thickness and high efficiency of the dielectric metasurfaces, the designed devices can manipulate beams in a relatively short distance with low insertion loss. They can also realize functions critical for three-dimensional (3D) photonic integrated circuits (PICs) that are difficult for conventional micro-optic elements. The designs of several key photonic components are presented in this work as proof-of-concept. Specifically, three applications based on the proposed platform are demonstrated numerically, including on-chip beam collimation, spatial mode (de)multiplexing, and focusing vertical out-coupling. These functionalities can be realized within a short propagating length. This work presents a theoretical study on the design principles and performances of the proposed devices, which can be implemented by adopting the existed technology of inserting classic thin-film elements into photonic chips in the near future. The results suggest a novel and general path for optical signal manipulations within the 3D photonic chips and may prove useful in the design of transceiver devices for optical communication, optical sensor chips, compact chips for optical computation, etc.

show abstract

Section: Vertical Out-coupler For Multilayer Waveguidesmentioning

confidence: 99%

Light manipulation in three-dimensional photonic integrated circuits using vertically inserted metasurfaces

Wu¹,

Zhang²

2021

Phys. Scr.

View full text Add to dashboard Cite

show abstract

Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications

Huang

Liu

Wang

et al. 2022

Journal of Vacuum Science &Amp; Technology B

View full text Add to dashboard Cite

Patterned surface microstructures over a common silicon wafer are constructed by a single-mask ultraviolet (UV) photolithography and a dual-step wet potassium hydroxide etching. Oriented surface contours such as aspherical refractive profiles, diffractive phase steps, or even the composite appearance shaped by combining both refractive and diffractive microprofiles can be accurately predicted and finely configured through computational fitting. This critical operation involves a careful adjustment of the location of silicon microholes with suitable apertures and concave depths so as to outline a needed square microwindow map defined by the single-mask UV photolithography. This approach leads to an aspherical surface or phase steps with required roughness based on a greedy algorithm developed in-house. The obtained micro-optical films can be effectively used to transform common laser beams with a typical Gaussian profile into patterned beams with various complicated wavefronts. The proposed method highlights a low-cost development of adaptive optical imaging by constructing relatively complicated wavefront or objective circumstances for quantitatively evaluating imaging efficiency. The technology should find typical applications in antilaser interference or attack imaging.

show abstract

Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography

Cited by 2 publications

References 26 publications

Light manipulation in three-dimensional photonic integrated circuits using vertically inserted metasurfaces

Light manipulation in three-dimensional photonic integrated circuits using vertically inserted metasurfaces

Flexible refractive and diffractive micro-optical films shaped by fitting aspherical microprofiles with featured aperture and depth and their spatial arrangement for imaging applications

Contact Info

Product

Resources

About