Fast full-FEM computation of COM parameters. Application to multilayered SAW structures

Shaposhnikov, Kirill; Nicolay, Pascal

doi:10.1109/ultsym.2014.0371

Cited by 9 publications

(3 citation statements)

References 20 publications

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“…In addition, as the aperture of the device is considered infinite, it can be (in the model) reduced to a fraction of the wavelength by using periodic boundary conditions. The substrate thickness is also reduced to a few wavelengths, using a perfectly matched layer (PML) placed at the bottom of the substrate [13]. This PML avoids reflections of acoustics modes at the bottom of the substrate.…”

Section: Geometrymentioning

confidence: 99%

Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor

Chambon

Nicolay

Bruckner

et al. 2017

International Journal of Smart and Nano Materials

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Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor, International Journal of Smart and Nano Materials, 8:2-3, 95-109, DOI: 10.1080/19475411.2017 . As the wave propagation time is much smaller than the typical time constant of the phenomena to be monitored (deformation, temperature change etc.), the analysis can be performed in three successive steps. First, a static FEM study of the complete sensor (housing included) is carried out, to compute the temperature, stress and strain fields generated in the sensitive area by the measured parameters (pressure, temperature, etc.). Then, a dynamic electro-mechanical study of the R-DL is performed. The simulation takes the previously computed fields into account, which makes it possible to compute the sensor sensitivity to the measured parameters. The model takes advantage of the periodicity of the components of the R-DL to compute phenomenological parameters (Coupling-of-Mode parameters), which can later on be used to compute the electrical response of the sensor (step 3). In this paper, we focus on the first two steps. The COM parameters are extracted, under simultaneous thermal and mechanical stresses. Especially, the sensor sensitivity is obtained from the evolution of the velocity, under various stress configurations.ARTICLE HISTORY

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Section: Geometrymentioning

confidence: 99%

Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor

Chambon

Nicolay

Bruckner

et al. 2017

International Journal of Smart and Nano Materials

Self Cite

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“…In the available numerical simulation techniques, the coupling-of-modes (COM) model is commonly used and proven to be an efficient modeling approach to design SAW devices [10,[12][13][14][15]. However, the COM model is a phenomenological model, and its COM parameters have to be first determined either via measurements or precise theoretical numerical methods, for example the finite element method (FEM), or the boundary element method combined with a finite element method (FEM/BEM) [16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Li,

Zhang,

Yang

et al. 2023

Micromachines

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This paper presents an advanced method that combines coupling-of-modes (COM) theory and the finite element method (FEM), which enables the quick extraction of COM parameters and the accurate prediction of the electroacoustic and temperature behavior of surface acoustic wave (SAW) devices. For validation, firstly, the proposed method is performed for a normal SAW resonator. Then, the validated method is applied to analysis of an I.H.P. SAW resonator based on a 29°YX−LT/SiO2/SiC structure. Via optimization, the electromechanical coupling coefficient (K2) is increased up to 13.92% and a high quality (Q) value of 1265 is obtained; meanwhile, the corresponding temperature coefficient of frequency (TCF) is −10.67 ppm/°C. Furthermore, a double-mode SAW (DMS) filter with low insertion loss and excellent temperature stability is also produced. It is demonstrated that the proposed method is effective even for SAW devices with complex structures, providing a useful tool for the design of SAW devices with improved performance.

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“…However, this process is both time-consuming and expensive because of the many degrees of SAW structures, such as the relative electrode thickness, the metallization ratio and the electrode profile. Some numerical methods, such as a combination of FEM and boundary element methods [12,13], a full FEM [14] and finite element method-spectral domain analysis [15,16], have also been employed for COM parameters extraction.…”

Section: Introductionmentioning

confidence: 99%

Fast, Accurate and Full Extraction of Coupling-of-Modes Parameters by Finite Element Method

Sun

Zhou

et al. 2022

Crystals

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This paper presents a new numerical approach for the full extraction of the coupling-of-modes (COM) parameters by stationary and eigenfrequency analyses in the finite element method (FEM). This is a fast method extracting from the results of static analysis and eigenfrequency analysis. It avoids the long calculation time of admittance frequency response analysis, which is commonly used in extracting COM parameters. In addition to the usual COM parameters (velocity, reflection coefficient, transduction coefficient and capacitance), the phases of reflection and transduction coefficient can be also extracted with this method. The proposed method was applied to different cutting types LiNbO3 with different types of thicknesses in a varying interdigital transducer (IDT). These examples show that our approach has great potential in extracting all the COM parameters of the Rayleigh SAW for all kinds of IDT structures. Therefore, it is a fast, accurate, general and full extraction approach of COM parameters.

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Fast full-FEM computation of COM parameters. Application to multilayered SAW structures

Cited by 9 publications

References 20 publications

Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor

Analysis of the sensitivity to pressure and temperature of a membrane based SAW sensor

The Extraction of Coupling-of-Modes Parameters in a Layered Piezoelectric Substrate and Its Application to a Double-Mode SAW Filter

Fast, Accurate and Full Extraction of Coupling-of-Modes Parameters by Finite Element Method

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