Fast, low insertion-loss optical switch using lithographically defined electromagnetic microactuators and polymeric passive alignment structures

Abstract

A micro-optoelectromechanical switch that combines microactuator technology developed via the Lithographie Galvanformung Abformung process with lithographically defined polymeric alignment elements is described. The multimode optical switch achieves submillisecond switching times, low insertion loss (<1 dB), low cross talk (<70 dB), low voltage (3 V), and wavelength independence.

Design and Analysis of a Fibre-Shaped Micro-Actuator for Robotic Gripping

“…A controlled microactuator is needed to carry out these tasks. Many examples of actuation technology are already available: piezoelectric, electromagnetic, shape memory alloys (SMA), electrostatic, polymeric, electroreological, SMA polymeric, chemical-mechanical, etc [9-17].…”

“…[1][2][3][4][5][6][7]. Micropositioning is the ability to move objects with a micrometric resolution by a defined stroke [8] [9][10][11][12][13][14][15][16][17].…”

A 1 × 2 optical fiber switch using a dual-thickness SOI process

“…Various MEMS fiber-switching designs for 1 × 2 optical switches have been proposed, such as the SDA cammicromotor type [9], shape-memory-alloy (SMA) type [10], micro-magnetic-alloy-pipe type [11], electrostatic-parallelplate type [12], bistable-thermal-actuation type [13] and magnetic-actuation type [14,15]. There are some issues among these types of designs.…”

“…Also, although the parallel plate actuator [12] can generate a large lateral displacement for fiber switching, it requires a larger structure length (die size is about 35 mm × 1.5 mm) and structure thickness (∼500 µm) in order to generate adequate force and to reduce the axial and angular misalignment for butt coupling. Furthermore, in [10,11,14,15], since the devices require magnetic coils or magnets for actuation, the fabrication and assembly processes are relatively complicated. In this work, we also employ the fiber-switching design as the switching mechanism of our optical fiber switch.…”

High-power optical microswitch based on direct fiber actuation

“…These macro switches most often hold the fibers in an alignment sleeve and use magnetic actuation to move the fibers in and out of alignment. Macro-scale bending fiber switches that use some assembled micromachined parts have also appeared previously [5][6][7][8]. These switches use micromachined parts such as v-groove fiber holders and positioning stages in conjunction with macro parts, such as electromagnetic actuators, to create a complete switch.…”