Fast piezoelectric scanning MEMS mirror for 1D ion addressing

Janin, Paul; Bauer, Ralf; Griffin, Paul F.; Riis, Erling; Uttamchandani, Deepak

doi:10.1109/omn.2019.8925168

Cited by 5 publications

(3 citation statements)

References 5 publications

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“…Figure 1 ). 48 The device geometry uses mechanical coupling to produce tip-tilt rotations of more than 1° at frequencies greater than 100 kHz. The device was fabricated using the cost-effective MEMSCAP PiezoMUMPS multiuser process using a 10 μm silicon-on-insulator device layer for the device geometry and a 500 nm aluminum nitride piezo-electric layer.…”

Section: Methodsmentioning

confidence: 99%

Tunable Wide-Field Illumination and Single-Molecule Photoswitching with a Single MEMS Mirror

et al. 2021

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Homogeneous illumination in single-molecule localization microscopy (SMLM) is key for the quantitative analysis of super-resolution images. Therefore, different approaches for flat-field illumination have been introduced as alternative to the conventional Gaussian illumination. Here, we introduce a single microelectromechanical systems (MEMS) mirror as a tunable and cost-effective device for adapting wide-field illumination in SMLM. In flat-field mode the MEMS allowed for consistent SMLM metrics across the entire field of view. Employing single-molecule photoswitching, we developed a simple yet powerful routine to benchmark different illumination schemes on the basis of local emitter brightness and ON-state lifetime. Moreover, we propose that tuning the MEMS beyond optimal flat-field conditions enables to study the kinetics of photoswitchable fluorophores within a single acquisition.

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Section: Methodsmentioning

confidence: 99%

Tunable Wide-Field Illumination and Single-Molecule Photoswitching with a Single MEMS Mirror

et al. 2021

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“…The scanner has a 400 µm mirror diameter and is etched in single-crystal silicon, ensuring good reliability and tolerance to deformation (cf. Fig 1) (48). The device geometry uses mechanical coupling to produce tip-tilt rotations of more than 1°at frequencies greater than 100 kHz.…”

Section: Mems the Microelectromechanical Systems (Mems) Mir-mentioning

confidence: 99%

Tuneable wide-field illumination and single-molecule photoswitching with a single MEMS mirror

Herdly

Janin

Bauer

et al. 2021

Preprint

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Homogeneous illumination in single-molecule localization microscopy (SMLM) is key for the quantitative analysis of super-resolution images. Therefore, different approaches for flat-field illumination have been introduced as alternative to the conventional Gaussian illumination. Here, we introduce a single microelectromechanical systems (MEMS) mirror as a tuneable and cost-effective device for adapting wide-field illumination in SMLM. In flat-field mode the MEMS allowed for consistent SMLM metrics across the entire field of view. Employing single-molecule photoswitching, we developed a simple yet powerful routine to benchmark different illumination schemes on the basis of local emitter brightness and ON-state lifetime. Moreover, we propose that tuning the MEMS beyond optimal flat-field conditions enables to study the kinetics of photoswitchable fluorophores within a single acquisition.

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“…Thanks to the unique beam steering capabilities, MEMS mirrors have been applied to various fields including projection displays [5][6][7], LiDAR systems [8][9][10], inspection tools like bio-imaging applications [11][12], laser material processing [13], and quantum technologies (Fig. 3) [14]. Previously, the development of the mirror device was primarily focused on increasing mirror diameter, scan angle, or resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

Hwang,

Yarar,

Wysocki

et al. 2024

MOEMS and Miniaturized Systems XXIII

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This paper presents the feasibility of implementing various scan patterns, ranging from quasi-static to resonant driving methods, using newly developed 3D-constructed Al(Sc)N piezoelectric MEMS mirrors. A description of the assembled device and how each driving method was tried and characterized are also provided. According to the quasi-static driving test result, tilting angle of ±10° was achieved by both AlN and AlScN based-MEMS mirrors. For 1D resonant scanning, total optical scan angle (TOSA) of 20° was obtained under the low applied voltage of 1.5 Vpp. Further investigations were conducted on various 2D scan patterns, including Lissajous and circular scans. The characterization results show that Lissajous scan patterns with various field-of-view (FOV) sizes can be realized by adjusting the applied voltage and driving frequencies. In the case of circular scan, a TOSA of 10° was achieved, demonstrating the potential for 360° of omnidirectional scanning using the presented mirror devices. In addition, assessments of the electrical stability of fabricated piezoelectric material under high voltage and the mechanical robustness based on long-term cycling tests were conducted to ensure the reliability of the device. The presented low-power compact Al(Sc)N-based piezoelectric MEMS mirror device possesses a wide range of specifications, affording it the capability for application and customization to meet various purposes, while also holding significant potential for further advancements in its utility.

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Fast piezoelectric scanning MEMS mirror for 1D ion addressing

Cited by 5 publications

References 5 publications

Tunable Wide-Field Illumination and Single-Molecule Photoswitching with a Single MEMS Mirror

Tunable Wide-Field Illumination and Single-Molecule Photoswitching with a Single MEMS Mirror

Tuneable wide-field illumination and single-molecule photoswitching with a single MEMS mirror

Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors

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