Fast pulsed gas valve

Keyser, C J; Dembinski, Matthias; John, P.

doi:10.1063/1.1136239

Cited by 20 publications

(3 citation statements)

References 8 publications

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“…The low pressure behind the sampling orifice can be achieved by a combination of a small sampling orifice with a large pumping speed of the vacuum pump, or by pulsing the gas flow through the sampling orifice. Several pulsing schemes have been reported in the past [161][162][163][164], where the scheme with the rotating skimmer of Benedikt et al [164][165][166][167] has been successfully applied for the quantitative characterization of atmospheric pressure microplasmas.…”

Section: Concise Theoretical Backgroundmentioning

confidence: 99%

Quadrupole mass spectrometry of reactive plasmas

Benedikt¹,

Hecimovic²,

Ellerweg³

et al. 2012

J. Phys. D: Appl. Phys.

100

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Reactive plasmas are highly valued for their ability to produce large amounts of reactive radicals and of energetic ions bombarding surrounding surfaces. The non-equilibrium electron driven plasma chemistry is utilized in many applications such as anisotropic etching or deposition of thin films of high-quality materials with unique properties. However, the non-equilibrium character and the high power densities make plasmas very complex and hard to understand. Mass spectrometry (MS) is a very versatile diagnostic method, which has, therefore, a prominent role in the characterization of reactive plasmas. It can access almost all plasma generated species: stable gas-phase products, reactive radicals, positive and negative ions or even internally excited species such as metastables. It can provide absolute densities of neutral particles or energy distribution functions of energetic ions. In particular, plasmas with a rich chemistry, such as hydrocarbon plasmas, could not be understood without MS. This review focuses on quadrupole MS with an electron impact ionization ion source as the most common MS technique applied in plasma analysis. Necessary information for the understanding of this diagnostic and its application and for the proper design and calibration procedure of an MS diagnostic system for quantitative plasma analysis is provided. Important differences between measurements of neutral particles and energetic ions and between the analysis of low pressure and atmospheric pressure plasmas are described and discussed in detail. Moreover, MS-measured ion energy distribution functions in different discharges are discussed and the ability of MS to analyse these distribution functions with time resolution of several microseconds is presented.

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Section: Concise Theoretical Backgroundmentioning

confidence: 99%

Quadrupole mass spectrometry of reactive plasmas

Benedikt¹,

Hecimovic²,

Ellerweg³

et al. 2012

J. Phys. D: Appl. Phys.

100

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show abstract

“…В упомянутых выше работах [3][4][5] использовался ме-тод зондирования газовой струи электронным пучком, который достаточно надежен, но требует использования нестандартной высоковольтной аппаратуры. Наибольшее распространение получили ионизационные манометры, с 1950-х годов [6] применяемые для регистрации импульсных молекулярных пучков [7][8][9][10] и решения задач управляемого термоядерного синтеза [11]. Малые длительности газовых импульсов и их фронтов (10−100 µs), характерные для таких приложений, заставляют экспериментаторов разрабатывать собственные датчики либо существенно дорабатывать имеющиеся.…”

Section: Introductionunclassified

Исследование Нестационарного Воздушного Потока В Большой Вакуумной Камере С Помощью Стандартного Ионизационного Манометра

Коробков¹,

Гущин²,

Стриковский³

et al. 2019

Журнал Технической Физики

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A method for creating a pressure gradient by pulsed injection of air into a large vacuum chamber for laboratory simulation of plasma phenomena in a vertically nonuniform atmosphere is proposed. The dynamics of subsonic and transonic air flows at different background chamber pressures is studied. The feasibility of creating and detecting instantaneous pressure drops by more than two orders of magnitude on a scale of about one meter is shown. Features of the operation of the PMI-10-2 ionization gauge used for pressure measurements in a pulsed gas flow are discussed.

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“…[11][12][13][14][15][16][17][18][19][20][21][22] Closing of the valve is achieved by springs, inlet gas pressure, or mechanical deformation of the diaphragm. In some cases a plenum is used to meter a precise quantity of gas.…”

Section: Introductionmentioning

confidence: 99%

Thermal instability of electrolytic capacitor bank used for gas puff valve

Bellan

2002

Review of Scientific Instruments

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It is shown that self-heating of electrolytic capacitors causes the output current of a capacitor bank to increase with successive shots even though the charge voltage is held constant. Self heating of only 10°C can cause a near tripling in the gas output of the gas puffing valves commonly used in spheromak research. By using metallized polypropylene film capacitors instead of electrolytic capacitors the reproducibility is substantially improved ͑the shot-to-shot variation in gas output is reduced to be Ͻ0.5%͒.

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Fast pulsed gas valve

Cited by 20 publications

References 8 publications

Quadrupole mass spectrometry of reactive plasmas

Quadrupole mass spectrometry of reactive plasmas

Исследование Нестационарного Воздушного Потока В Большой Вакуумной Камере С Помощью Стандартного Ионизационного Манометра

Thermal instability of electrolytic capacitor bank used for gas puff valve

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