Fast-Response Flexible Temperature Sensors with Atomically Thin Molybdenum Disulfide

Abstract

Real-time thermal sensing on flexible substrates could enable a plethora of new applications. However, achieving fast, submillisecond response times even in a single sensor is difficult, due to the thermal mass of the sensor and encapsulation. Here, we fabricate flexible monolayer molybdenum disulfide (MoS 2 ) temperature sensors and arrays, which can detect temperature changes within a few microseconds, over 100× faster than flexible thin-film metal sensors. Thermal simulations indicate the sensors' response time is only limited by the MoS 2 interfaces and encapsulation. The sensors also have high temperature coefficient of resistance, ∼1−2%/K and stable operation upon cycling and long-term measurement when they are encapsulated with alumina. These results, together with their biocompatibility, make these devices excellent candidates for biomedical sensor arrays and many other Internet of Things applications.

Large‐Scale Ultra‐Robust MoS2 Patterns Directly Synthesized on Polymer Substrate for Flexible Sensing Electronics

“…We fabricate a temperature sensor using printed and annealed MoS 2 films due to the high sensitivity of MoS 2 to thermal change. [ 50 ] As displayed in the inset of Figure a, a silver interdigital electrode with an electrode width and spacing of 200 µm is printed on the surface of the MoS 2 film by screen‐printing technique. Figure 4a shows the representative sensing characteristics for the fully‐printed temperature sensor by recording resistance response to temperature variation from 30 to 70 °C with an interval of 0.1 °C.…”

Technology Roadmap for Flexible Sensors

“…Wearable biosensors are still in early stages of development and many sensing capabilities await exploration and development. ,− The first area of improvement is to expand the portfolio of biomarkers that can be detected, to approach and to exceed current clinical assays. Complex biomarkers ( e.g.…”

Latest Innovations in 2D Flexible Nanoelectronics

“…Flexible monolayer MoS 2 temperature sensors and arrays have been created by Daus, Alwin, and their co‐workers. [ 4 ] These sensors are over one hundred times faster at detecting temperature changes compared to flexible thin‐film metal sensors, which can take several microseconds. Thin metal microheaters were fabricated on top of an Al 2 O 3 passivation layer, which are shown in Figure 5m,n, in order to investigate the response time of flexible MoS 2 temperature sensors.…”