Fast response humidity sensors for a medical microsystem

Tetelin, Angélique; Pellet, Claude; Laville, C; N’Kaoua, Gilles

doi:10.1016/s0925-4005(03)00090-x

Cited by 80 publications

(31 citation statements)

References 9 publications

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“…16 Polyimide has superior characteristics such as high temperature resistance, a low dielectric constant, good mechanical strength, and dimensional stability, and is typically the material of choice for a capacitive humidity sensor's dielectric, due to its higher affinity toward moisture absorption and desorption. 16,18 PDMS layer was also used as a back support for our platform and a barrier from plant transpiration due to its hydrophobic nature. Detailed schematics of the fabrication process flow is illustrated in Fig.…”

Section: Compliant and Biocompatible Plant Sensorsmentioning

confidence: 99%

Compliant plant wearables for localized microclimate and plant growth monitoring

et al. 2018

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The microclimate surrounding a plant has major effect on its health and photosynthesis process, where certain plants struggle in suboptimal environmental conditions and unbalanced levels of humidity and temperature. The ability to remotely track and correlate the effect of local environmental conditions on the healthy growth of plants can have great impact for increasing survival rate of plants and augmenting agriculture output. This necessitates the widespread distribution of lightweight sensory devices on the surface of each plant. Using flexible and biocompatible materials coupled with a smart compact design for a low power and lightweight system, we develop widely deployed, autonomous, and compliant wearables for plants. The demonstrated wearables integrate temperature, humidity and strain sensors, and can be intimately deployed on the soft surface of any plant to remotely and continuously evaluate optimal growth settings. This is enabled through simultaneous detection of environmental conditions while quantitatively tracking the growth rate (viz. elongation). Finally, we establish a nature-inspired origami-assembled 3D-printed "PlantCopter", used as a launching platform for our plant wearable to enable widespread microclimate monitoring in large fields.

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Section: Compliant and Biocompatible Plant Sensorsmentioning

confidence: 99%

Compliant plant wearables for localized microclimate and plant growth monitoring

et al. 2018

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“…It is also reported that carbon filled polysulfone can be used as good electrodes for humidity sensors based on polyimides. 145 Other polymers suitable for capacitive humidity sensors include polyethersulphone (PES), 144 polysulfone (PSF), 156 divinyl siloxane benzocyclobutene (BCB), 157 hexamethyldisilazane (HMDSN), 158 etc. The capacitive humidity sensors have linear response as low as 15% RH 121 144 148 155 and some have very low hysteresis (<2%).…”

Section: Hydrophobic Polymer-based Capacitive Sensorsmentioning

confidence: 99%

Humidity Sensors: A Review of Materials and Mechanisms

Chen¹,

Lu²

2005

Sen Lett

1,343

708

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We have reviewed humidity sensors based on various materials for both relative and absolute humidity, including ceramic, semiconducting, and polymer materials. In the majority of publications, there are few papers dealing with absolute humidity sensors, which have extensive applications in industry. We reviewed extensively absolute humidity sensors in this article, which is unique comparing with other reviews of humidity sensors. The electrical properties of humidity sensors such as sensitivity, response time, and stability have been described in details for various materials and a considerable part of the review is focused on the sensing mechanisms. In addition, preparation and characterization of sensing materials are also described. For absolute humidity sensors, mirrorbased dew-point sensors and solid-state Al 2 O 3 moisture sensors have been described. As the major problem in Al 2 O 3 moisture sensors, long-term instability, has been solved, -Al 2 O 3 moisture sensors may have promising future in industry.

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“…[1][2][3] A number of criteria such as high sensitivity, repeatability, and short response time are generally required for such devices. [4][5][6] It should be noted that for specific uses, such as meteorology applications (in radiosondes and weather balloons 7 ), medical diagnostics of exhaled air (for example, pulmonary function diagnosis 8 ), and aerospace applications on board of space vehicles, 9 the response time becomes crucial because humidity measurements and data acquisition in such cases are to be conducted in real time.…”

Section: ' Introductionmentioning

confidence: 99%

TiO₂/LiCl-Based Nanostructured Thin Film for Humidity Sensor Applications

Buvailo

Xing

Hines

et al. 2011

ACS Appl. Mater. Interfaces

109

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A simple and straightforward method of depositing nanostructured thin films, based on LiCl-doped TiO 2 , on glass and LiNbO 3 sensor substrates is demonstrated. A spin-coating technique is employed to transfer a polymer-assisted precursor solution onto substrate surfaces, followed by annealing at 520°C to remove organic components and drive nanostructure formation. The sensor material obtained consists of coin-shaped nanoparticles several hundred nanometers in diameter and less than 50 nm thick. The average thickness of the film was estimated by atomic force microscopy (AFM) to be 140 nm. Humidity sensing properties of the nanostructured material and sensor response times were studied using conductometric and surface acoustic wave (SAW) sensor techniques, revealing reversible signals with good reproducibility and fast response times of about 0.75 s. The applicability of this nanostructured film for construction of rapid humidity sensors was demonstrated. Compared with known complex and expensive methods of synthesizing sophisticated nanostructures for sensor applications, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), this work presents a relatively simple and inexpensive technique to produce SAW humidity sensor devices with competitive performance characteristics.

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Fast response humidity sensors for a medical microsystem

Cited by 80 publications

References 9 publications

Compliant plant wearables for localized microclimate and plant growth monitoring

Compliant plant wearables for localized microclimate and plant growth monitoring

Humidity Sensors: A Review of Materials and Mechanisms

TiO₂/LiCl-Based Nanostructured Thin Film for Humidity Sensor Applications

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Fast response humidity sensors for a medical microsystem

Cited by 80 publications

References 9 publications

Compliant plant wearables for localized microclimate and plant growth monitoring

Compliant plant wearables for localized microclimate and plant growth monitoring

Humidity Sensors: A Review of Materials and Mechanisms

TiO2/LiCl-Based Nanostructured Thin Film for Humidity Sensor Applications

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Product

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About

TiO₂/LiCl-Based Nanostructured Thin Film for Humidity Sensor Applications