Abstract:For large optical elements which are tested by many sub-apertures, it takes too much time for a sub-aperture stitching algorithm to get the stitching result. To solve this problem, we propose a fast sub-aperture stitching algorithm to quickly compensate for piston, tilt, and defocus errors. Moreover, the new algorithm is easy to understand and program. We use partial derivatives of measurement data to separately solve piston, tilt, and defocus errors. First, we show that the new algorithm has a lower time comp… Show more
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