12th Annual Symposium on Gallium Arsenide Integrated Circuit (GaAs IC)
DOI: 10.1109/gaas.1990.175460
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Fast thin film vanadium dioxide microwave switches

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Cited by 14 publications
(9 citation statements)
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“…devices is limited to several nanoseconds either due to the test structure or measurement setup limitations [5][6][7][8]. The demonstrated fastest switching speed (from electrical measurements) is ~5 ns for planar devices [5], and ~ 170 ns for out-of-plane devices [6].…”
mentioning
confidence: 99%
“…devices is limited to several nanoseconds either due to the test structure or measurement setup limitations [5][6][7][8]. The demonstrated fastest switching speed (from electrical measurements) is ~5 ns for planar devices [5], and ~ 170 ns for out-of-plane devices [6].…”
mentioning
confidence: 99%
“…We investigate the corresponding RF S-parameter properties up to 13.5 GHz and power handling capabilities for possible RF applications in high frequency filters, modulators, and active microwave device components. 3,5,[10][11][12][13][14][15][16] We show that high RF input power can reduce the resistance of VO 2 similarly as applied DC voltage. We compare transient and RF properties with published results on VO 2 and present lumped circuit element and 3D electromagnetic simulations that model the RF properties quite well.…”
Section: Introductionmentioning
confidence: 99%
“…Vanadium dioxide-based RF devices get considerable attention only for a decade, although there are handful of work in early 1990s [56,57]. The first reported work on VO 2 based RF switches is done by Sovero et al [56]. They demonstrated VO 2 based RF switches on Si 3 N 4 /GaAs (Gallium arsenide) substrate triggered by on chip heater with 30 mW of power.…”
Section: Device Fabrication and Rf Characteristicsmentioning
confidence: 99%