Fastener Failure Detection Using a Surface Acoustic Wave Strain Sensor

Wilson, William C.; Rogge, Matthew D.; Fisher, B.; Malocha, D.C.; Atkinson, Gary M.

doi:10.1109/jsen.2011.2181160

Cited by 42 publications

(17 citation statements)

References 13 publications

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“…Next, an Si 3 N 4 film was deposited for insulation, and patterned (3). Cr/Au electrodes were then sputtered and patterned (4). The Si device layer was next deep-etched to create cantilevers (5).…”

Section: Fabrication and Experimentsmentioning

confidence: 99%

Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

Takata

Sasaki

Tanaka³

et al. 2016

Elect Comm in Japan

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SUMMARYAcoustic emission (AE) sensors are attractive for the detection of machine fracture in real time. We fabricated AE sensors using the MEMS technology. The AE sensors consisted of silicon cantilevers resonating at frequencies of 50, 100, and 150 kHz. Silicon piezoresistors were installed close to the cantilevers. In order to obtain an ambient pressure appropriate for the operation of the cantilevers, the Q factor of the cantilevers was calculated by analytical models as a function of pressure. The properties of the fabricated sensors were measured in a vacuum chamber. We also tentatively packaged the AE sensor and an amplifier in a vacuum to decrease the influences of air damping and noise.

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Section: Fabrication and Experimentsmentioning

confidence: 99%

Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

Takata

Sasaki

Tanaka³

et al. 2016

Elect Comm in Japan

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“…The aluminum enclosure contained two SAW devices; one device was bonded rigidly to the bottom of the package and the other device was bonded with a flexible bonding agent (RTV) in a layered fashion on top of a small layer of rubber with another layer of RTV in order to isolate it from strain effects. In past research efforts, this sensing module was used to measure strain in the rigidly-mounted device and temperature in the flexible mounted device to form a temperature compensated strain measurement [17]. In the effort presented here, vibration was measured using only the rigidly mounted device, as the particular processing used to measure vibration effects is negligibly affected by temperature changes.…”

Section: Sensor Descriptionmentioning

confidence: 99%

Surface acoustic wave vibration sensors for measuring aircraft flutter

Wilson

Moore

Juarez

2016

2016 IEEE International Conference on Prognostics and Health Management (ICPHM)

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Under NASA's Advanced Air Vehicles Program the Advanced Air Transport Technology (AATT) Project is investigating flutter effects on aeroelastic wings. To support that work a new method for measuring vibrations due to flutter has been developed. The method employs low power Surface Acoustic Wave (SAW) sensors. To demonstrate the ability of the SAW sensor to detect flutter vibrations the sensors were attached to a Carbon fiber-reinforced polymer (CFRP) composite panel which was vibrated at six frequencies from 1Hz to 50Hz. The SAW data was compared to accelerometer data and was found to resemble sine waves and match each other closely. The SAW module design and results from the tests are presented here.

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“…Surface Acoustic Wave (SAW) sensor is a type of micro-machined passive wireless sensors that have been widely investigated and used for strain, pressure and temperature sensing, etc. [16][17][18][19][20][21][22]. A SAW sensor system consists of two parts: a SAW device connected to an antenna as the sensor transponder which need not battery supply, a local reader unit which is used for interrogation signal transmitting, echoed data receiving and data processing.…”

Section: Introductionmentioning

confidence: 99%

An Impedance-Loaded Orthogonal Frequency-Coded SAW Sensor for Passive Wireless Sensor Networks

Dai

Fang

Zhang

et al. 2020

Sensors

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A passive wireless impedance-loaded orthogonal frequency-coded (OFC) surface acoustic wave (SAW) sensor for wireless sensor networks was proposed in this paper. One of the chips on OFC SAW tag is connected to an external sensor, which could cause a phase shift in the time response of the corresponding part on the SAW device. The phase shift corresponds to the sensed quantity, which could be temperature, strain, vibration, pressure, etc. The OFC SAW tag is isolated by a proper package from the direct effect of the measurand on the device’s response which could avoid the multiple measurands coupling. The simultaneous work of multiple sensors is guaranteed by orthogonal frequency coding. By processing the response based on an extended matched filter algorithm, sensing information of the specific coded OFC device can be extracted from the superimposed response of multiple independent encoded sensors. Compared to previous methods, the proposed method can produce a more flexible passive (battery-free) wireless sensor suitable for large-scale wireless sensor networks. Simulation and experimental results demonstrate the effectiveness of the sensor.

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Fastener Failure Detection Using a Surface Acoustic Wave Strain Sensor

Cited by 42 publications

References 13 publications

Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

Surface acoustic wave vibration sensors for measuring aircraft flutter

An Impedance-Loaded Orthogonal Frequency-Coded SAW Sensor for Passive Wireless Sensor Networks

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