By using piezoelectric force microscopy and scanning Kelvin probe microscopy, we have investigated the domain evolution and space charge distribution in planar BiFeO 3 capacitors with different electrodes. It is observed that charge injection at the film/electrode interface leads to domain pinning and polarization fatigue in BiFeO 3 . Furthermore, the Schottky barrier at the interface is crucial for the charge injection process. Lowering the Schottky barrier by using low work function metals as the electrodes can also improve the fatigue property of the device, similar to what oxide electrodes can achieve. a) Electronic mail: yuanguoliang@mail.njust.edu.cn b) Electronic mail: jlwang@ntu.edu.sg 2 Ferroelectric fatigue refers to the decrease of switchable polarization in a ferroelectric material after repetitive electrical cycling. 1 It is detrimental to ferroelectric based devices and should be minimized. There have been a large number of reports on the mechanism of the polarization fatigue. [2][3][4][5] The models proposed can generally be classified into three categories, namely charge injection, 6-9 defects, i.e. oxygen vacancies, redistribution 10-14 and local phase decomposition. [15][16][17] In our previous report, we have demonstrated that charge injection is likely the cause of fatigue in BiFeO 3 . 18 By using a planar capacitor (inset of Fig. 1 (a)), we have conducted piezoelectric force microscopy (PFM) and scanning Kelvin probe microscopy (SKPM) studies to investigate the domain evolution and space charge activities in BiFeO 3 during fatigue measurement. A clear correlation between injected electrons at the electrode/BiFeO 3 interface and domain pinning is established as shown in Figs. 1(a)-1(c) (For details, please refer to Ref. 18). However, this is not to say that defects are irrelevant to polarization fatigue. On the contrary, these injected electrons must be trapped in gap states which can be associated with existing defects or created by the high energy injected electrons. We emphasize that it is not the redistribution/accumulation of defects, but rather the charging/discharging of defects, leads to polarization fatigue eventually. To clarify the difference between metal and oxide electrodes, we have prepared and investigated BiFeO 3 planar capacitors using (La 0.7 ,Sr 0.3 )MnO 3 as electrodes. All the parameters for BiFeO 3 films deposition are the same as reported in our previous study. 18 Since (La 0.7 ,Sr 0.3 )MnO 3 requires higher deposition temperature than BiFeO 3 , the electrodes are prepared (by standard lithography and etching) first followed by BiFeO 3 (40 nm) deposition. Macroscopic polarizationelectric field measurement reveals no fatigue after 10 10 cycles (data not shown). In the in-plane (IP) PFM images taken after opposite electric field is applied to the film, no domain pinning is 4 observed up to 10 10 cycles (Figs. 1(d) and 1(e)). Furthermore, SKPM image reveals negligible electron injection at the (La 0.7 ,Sr 0.3 )MnO 3 /BiFeO 3 interfaces ( Fig. 1(f)), whereas signi...