Regularities of static and cyclic deformation, damage and fracture of heat-resistant steel 25Kh1M1F, based on the approaches of physical mesomechanics and 3D interferometry method, are presented in this paper. The applicability of these techniques for different hierarchy levels of deformation was studied. The investigation of scanning microscope photos was conducted for several dissipative structures, fragmentation of the material, localisation of macrodeformation and subsequent failure on macro- and mesolevel. It is shown that the used modern techniques of experimental analysis are very efficient in understanding deformation and damage evolution in materials.DOI: http://dx.doi.org/10.5755/j01.ms.19.1.3821